Beam-steering micromirrors for large optical cross-connects

Aksyuk, Vladimir A.; Pardo, F.; Carr, Dustin W.; Greywall, Dennis S.; Chan, H. B.; Simon, M.E.; Gasparyan, A.; Shea, Herbert; Lifton, Victor A.; Bolle, C.; Arney, S.; Frahm, R.; Paczkowski, Mark A.; Haueis, Martin; Ryf, Roland; Neilson, David T.; Kim, J.; Giles, C.R.; Bishop, David J.

doi:10.1109/jlt.2003.811792

Cited by 126 publications

(57 citation statements)

References 13 publications

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“…Additionally, the stability of the mirror plays a critical role in the complexity of the control schemes. Early development focused on surface-micromachined two-axis scanners [51], [52]. The residue stress limits the mirror size to approximately 1 mm, and the different thermal expansion coefficients between the mirror and the metal coating also cause the mirror curvature to change with temperature.…”

Section: Three-dimensional Mems Switchesmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

307

141

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Abstract-The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost.

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Section: Three-dimensional Mems Switchesmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

307

141

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“…Given our expertise in silicon-based MEMS technology, and in particular on spatial light modulators [1,2,17,22], we focused our fabrication efforts in the first area. In this paper, we will specifically describe our efforts to create prototypes of a "direct-view" sensor based on MEMS cantilever technology.…”

Section: Background: Longwave Ir Technologiesmentioning

confidence: 99%

Opportunities in uncooled infrared imaging: A MEMS perspective

Jones¹,

Bolle²,

Ryf³

et al. 2009

Bell Labs Tech. J.

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The applications for IR imaging have traditionally been aggressively pursued by military and homeland security organizations and have trickled down to other organizations such as search and rescue, firefighting, and law enforcement. As technologies become cheaper, a wider consumer market starts to open up including consumer security (e.g., parking lot security), sporting goods, home security, home heating/inspection markets, and automotive safety systems. For example, LWIR imaging systems have recently been offered on high-end BMW automobiles; however, the high cost of these systems still makes them a luxury option for car buyers and not profitable for the car companies.The military continues to explore imaging systems where performance criteria are the most important factors: pixel count, sensitivity, and response time. Lower cost technologies are necessary to pursue consumer applications and would also be useful in the military arena for more widespread deployment

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“…Studies in imaging [1,2,3], optical communication networks [4,5], optical data storage devices [6], and projection display technologies [7,8] all make use of beam steering devices to improve system effectiveness. Many of these systems are implemented using mechanical structures such as galvanometer mirrors or microelectromechanical systems (MEMS).…”

Section: Introductionmentioning

confidence: 99%

Multiplexed broadband beam steering system utilizing high speed MEMS mirrors

Knoernschild¹,

Kim²,

Lu³

et al. 2009

Opt. Express

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Abstract:We present a beam steering system based on microelectromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5×5 array with 4 µs settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary. References and links

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Beam-steering micromirrors for large optical cross-connects

Cited by 126 publications

References 13 publications

Optical MEMS for Lightwave Communication

Optical MEMS for Lightwave Communication

Opportunities in uncooled infrared imaging: A MEMS perspective

Multiplexed broadband beam steering system utilizing high speed MEMS mirrors

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