2018
DOI: 10.1134/s1063782618120242
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Behavioral Features of MIS Memristors with a Si3N4 Nanolayer Fabricated on a Conductive Si Substrate

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Cited by 11 publications
(3 citation statements)
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“…Resistive switching random access memory (RRAM) can act as a synapse in a neuromorphic chip because of its low-power operation [7], fast switching time [8], high-density integration [9], and multi-level cells (MLC) with analogue switching [10][11][12][13][14]. The various resistive switching characteristics are achieved using a dielectric material and metal electrodes [15][16][17][18][19][20][21][22][23][24][25][26][27]. Additionally, the switching type can be changed depending on the operation conditions, such as the current and voltage levels [28].…”
Section: Introductionmentioning
confidence: 99%
“…Resistive switching random access memory (RRAM) can act as a synapse in a neuromorphic chip because of its low-power operation [7], fast switching time [8], high-density integration [9], and multi-level cells (MLC) with analogue switching [10][11][12][13][14]. The various resistive switching characteristics are achieved using a dielectric material and metal electrodes [15][16][17][18][19][20][21][22][23][24][25][26][27]. Additionally, the switching type can be changed depending on the operation conditions, such as the current and voltage levels [28].…”
Section: Introductionmentioning
confidence: 99%
“…Metal oxides such as HfO 2 and Al 2 O 3 are popular host insulators in CBRAM devices owing to their stable and reliable resistive switching characteristics compared to organic materials. Recently, nitride-based resistive switching compounds, such as AlN, ZrN, HfN, NiN, and SiN, have been reported to have excellent non-volatile properties comparable to metal oxides in terms of operation speed, endurance, and retention [ 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 ]. Especially, AlN is suitable for resistive switching memory owing to its high thermal conductivity and large band gap with good insulating properties [ 29 , 30 , 31 , 32 ] and could be improved by additional approaches such as the scaling, bilayer structure, and doping like oxide-based RRAM.…”
Section: Introductionmentioning
confidence: 99%
“…Resistive random-access memory (RRAM) is one of the strongest candidates for the next-generation nonvolatile memory technology due to low power consumption [ 1 ], fast switching speed [ 2 ], good complementary metal–oxide–semiconductor (CMOS) compatibility [ 3 , 4 , 5 ], and high scalability [ 6 ]. Until now, RRAM has been developed to focus on its applications such as high-density memory, embedded memory, and neuromorphic system.…”
Section: Introductionmentioning
confidence: 99%