Behavioral modeling and simulation of micromechanical resonator for communications applications

Mandelbaum, C.; Cases, S.; Bensaude, D.; Basteres, L.; Nachtergaele, Philippe

doi:10.1109/dtip.2003.1287002

Cited by 1 publication

(2 citation statements)

References 4 publications

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“…Here, in Equation 11, k1 is the linear spring constant 8 and k3 is the third order force non-linearity component 10 . From physics, we expect the unforced, undamped resonator to oscillate infinitely with constant amplitude at the resonance frequency fr.…”

Section: B Effects Of Damping and Temperaturementioning

confidence: 99%

“…Prior works have investigated on the initiation of the modeling approach of resonators [8]- [9] where a Finite Element Model (FEM) is transformed into an Analog Hardware Description Language (AHDL) model. A method for creating a fully non-linear device model has been reported in [10] which can be used as a black box for a 10-MHz clamped-clamped beam resonator reported as a test case in [11]. A subsequent simulation and inclusion of a similar model have been reported to show the plausibility of functionality of a MEMS resonator with an external electronic circuitry [12].…”

Section: Introductionmentioning

confidence: 99%

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A Comprehensive High-Level Model for CMOS-MEMS Resonators

2018

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This paper presents a behavioral modeling technique for CMOS-MEMS microresonators that enables simulation of a MEMS resonator model in Analog Hardware Description Language (AHDL) format within a system-level circuit simulation. A 100 kHz CMOS-MEMS resonant pressure sensor has been modeled into Verilog-A code and successfully simulated within Cadence framework. Analysis has shown that simulation results of the reported model are in agreement with the device characterization results. As an application of the proposed methodology, simulation and results of the model together with an integrated monolithic low-noise amplifier is exemplified for detecting the position change of the resonator.

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Section: B Effects Of Damping and Temperaturementioning

confidence: 99%