1993
DOI: 10.1002/app.1993.070501219
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Benzophenone‐containing methylthiomethyl pendant polyimides as negative acting photoresists

Abstract: SYNOPSISFour kinds of benzophenone-containing polyimides, each of which carries different amount or distribution of methylthiomethyl (MTM) pendant groups, are applied as negative photoresists. Lithographic evaluation of these polyimides shows that PI-42, the polyimide possessing the most, i.e., three MTM groups in a repeating unit on average, exhibits the highest sensitivity (09." = 129 mJ/cm2), the highest contrast value ( y = 4.3), and the highest resolution capability (1.2-pm lines and spaces can be resolve… Show more

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