“…In recent years, the Bi 2 Te 3 -based microthermoelectric (TE) devices have found significant and widespread applications in fields, such as precision temperature control of laser diodes, the active cooling of microchips, and the self-powered wearable electronics using human body heat. − It is well-known that the energy conversion efficiency of TE materials depends mainly on the dimensionless thermoelectric figure of merit ZT (defined as ZT = S 2 σ T /κ, where S , σ, κ and T are the Seebeck coefficient, electrical conductivity, thermal conductivity, and absolute temperature, respectively) . Importantly, the engineering of atomic-scale point defects is among the crucial approaches to optimize the thermoelectric performances of n-Bi 2 Te 3 films, the key component for integrating efficient thin-film TE devices. − …”