Biaxially Textured Al Film Growth on CaF<sub>2</sub> Nanostructures toward a Method of Preparing Single-Crystalline Si Film on Glass Substrates

Li, Huafang; Snow, Patrick; He, Meng-Dong; Wang, Pei-I; Wang, G.-C.; Lu, Toh‐Ming

doi:10.1021/nn1011978

Cited by 10 publications

(9 citation statements)

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“…Morphology and texture directly control many important physical properties such as optical, magnetic, and electrical properties of the films. A recent example is the intense interest in creating biaxially oriented films as a buffer layer or template for subsequent growth of highly oriented (both out-of-plane and in-plane) high T c superconducting films 1-3 or semiconductor films [4][5][6][7][8][9] for electronics and optoelectronics applications. A particular technique to create a biaxial film on an arbitrary substrate (including amorphous surface) is by the inclined substrate deposition 1-3 or oblique angle deposition technique.…”

Section: Introductionmentioning

confidence: 99%

“…A particular technique to create a biaxial film on an arbitrary substrate (including amorphous surface) is by the inclined substrate deposition 1-3 or oblique angle deposition technique. 5,6,9 In this technique, the incident flux strikes the substrate at an angle with respect to the substrate normal. For a given material, when deposited within an appropriate substrate temperature range, a texture selection can occur to create a film with preferred out-of-plane and in-plane orientations, or a biaxially orientated film.…”

Section: Introductionmentioning

confidence: 99%

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Incident flux angle induced crystal texture transformation in nanostructured molybdenum films

Chen

Wang

2012

Journal of Applied Physics

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Articles you may be interested inThe origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation J. Appl. Phys. 112, 083518 (2012); 10.1063/1.4759140Microstructure and temperature coefficient of resistance of thin cermet resistor films deposited from Cr Si 2 -Cr -Si C targets by S-gun magnetron In situ reflection high energy electron diffraction surface pole figure study of biaxial texture evolution in anisotropic Mg nanoblades during shadowing growth Molybdenum films were observed to undergo a dramatic change in crystal texture orientation when the incident flux angle was varied in an oblique angle sputter deposition on amorphous substrates. Reflection high-energy electron diffraction pole figure and scanning electron microscopy were used to analyze in detail the texture orientation of the films. The normal incident deposition resulted in a fiber texture film with the minimum energy (110) crystal plane parallel to the substrate surface. A (110)[1 10] biaxial texture was observed for the samples grown with low incident angles of less than 45 , with respect to the surface normal. On the other hand, for an oblique angle deposition of larger than 60 , a (111)[11 2] biaxial texture was observed and appeared to be consistent with a zone T structure where the geometrically fastest growth [001] direction of a crystal plays a dominant role in defining the texture. We argue that a structural transition had occurred when the incident flux was varied from near normal incidence to a large angle. V C 2012 American Institute of Physics. [http://dx.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Incident flux angle induced crystal texture transformation in nanostructured molybdenum films

Chen

Wang

2012

Journal of Applied Physics

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“…The latter results in formation of low energy grain boundaries, which leads to a microstructure that resembles that of single crystals. 1 This makes biaxially textured films suitable as buffer layers for highly oriented superconducting [1][2][3] and semiconducting [4][5][6] films. The majority of polycrystalline films are today synthesized by vapor condensation with the vapor flux typically arriving parallel with respect to the substrate surface normal at kinetically limited growth conditions.…”

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confidence: 99%

Double in-plane alignment in biaxially textured thin films

Elofsson

Saraiva

Boyd

et al. 2014

Applied Physics Letters

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The scientific interest and technological relevance of biaxially textured polycrystalline thin films stem from their microstructure that resembles that of single crystals. To explain the origin and predict the type of biaxial texture in off-normally deposited films, Mahieu et al. have developed an analytical model [S. Mahieu et al., Thin Solid Films 515, 1229 (2006)]. For certain materials, this model predicts the occurrence of a double in-plane alignment, however, experimentally only a single in-plane alignment has been observed and the reason for this discrepancy is still unknown. The model calculates the resulting in-plane alignment by considering the growth of faceted grains with an out-of-plane orientation that corresponds to the predominant film out-of-plane texture. This approach overlooks the fact that in vapor condensation experiments where growth kinetics is limited and only surface diffusion is active, out-of-plane orientation selection is random during grain nucleation and happens only upon grain impingement. Here, we compile and implement an experiment that is consistent with the key assumptions set forth by the in-plane orientation selection model by Mahieu et al.; a Cr film is grown off-normally on a fiber textured Ti epilayer to pre-determine the out-of-plane orientation and only allow for competitive growth with respect to the in-plane alignment. Our results show unambiguously a biaxially textured Cr (110) film that possesses a double in-plane alignment, in agreement with predictions of the in-plane selection model. Thus, a long standing discrepancy in the literature is resolved, paving the way towards more accurate theoretical descriptions and hence knowledge-based control of microstructure evolution in biaxially textured thin films.

Funding Agencies|Linkoping University

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“…In practice this means that the film structure is similar to that of a single crystal, making biaxially aligned films suitable as cost-effective large area buffer layers for superconducting [25,26] and semiconducting [27][28][29] films. To explain the development of the in-plane alignment an evolutionary growth model has been proposed [24].…”

Section: Film Formationmentioning

confidence: 99%

“…Films with this type of biaxial alignment typically exhibit small miss-orientations between grains that lead to low-energy grain boundaries and a microstructure similar to that of single crystals. They are thus applied as cost-effective large area buffer layers for superconducting [25,26] and semiconducting [27][28][29] films. In order to enable formation of a biaxial alignment, growth needs to take place at kinetically limited conditions where only surface diffusion is active [24].…”

Section: Biaxial Alignmentmentioning

confidence: 99%

Nanoscale structure forming processes : Metal thin films grown far-from-equilibrium

Elofsson¹

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The cover image shows a high angle annular dark field scanning transmission electron microscopy micrograph of elongated Ag-Cu atomic islands supported on a SiO 2 substrate. Intensity variation within each island stems from mass contrast caused by segregation into Ag-and Cu-rich domains. Image courtesy of Dr. Robert D. Boyd.During the course of research underlying this thesis, Viktor Elofsson was enrolled in Agora Materiae, a multidisciplinary doctoral program at Linköping University, Sweden.© Viktor Elofsson, unless otherwise stated. Printed by LiU-Tryck, Linköping, 2016. Till mormor. AbstractThin film growth from the vapor phase has for a long time intrigued researchers endeavouring to unravel and understand atomistic surface processes that govern film formation. Their motivation has not been purely scientific, but also driven by numerous applications where this understanding is paramount to knowledge-based design of novel film materials with tailored properties.Within the above framework, this thesis investigates growth of metal films on weakly bonding substrates, a combination of great relevance for applications concerning e.g., catalysis, graphene metallization and architectural glazing. When metal vapor condenses on weakly bonding substrates three dimensional islands nucleate, grow and coalesce prior to forming a continuous film. The combined effect of these initial growth stages on film formation and morphology evolution is studied using pulsed vapor fluxes for the model system Ag/SiO 2 . It is shown that the competition between island growth and coalescence completion determines structure evolution. The effect of the initial growth stages on film formation is also examined for the tilted columnar microstructure obtained when vapor arrives at an angle that deviates from the substrate surface normal. This is done using two metals with distinctly different nucleation behaviour, and the findings suggest that the column tilt angle is set by nucleation conditions in conjunction with shadowing of the vapor flux by adjacent islands. Vapor arriving at an angle can in addition result in films that exhibit preferred crystallographic orientations, both out-of-plane and in-plane. Their emergence is commonly described by an evolutionary growth model, which for some materials predict a double in-plane alignment that has not been observed experimentally. Here, an experiment is designed to replicate the model's growth conditions, confirming the existence of double in-plane alignment.New and added film functionalities can further be unlocked by alloying. Properties are then largely set by chemistry and atomic arrangement, where the latter can be affected by thermodynamics, kinetics and vapor flux modulation. Their combined effect on atomic arrangement is here unravelled by presenting a research methodology that encompasses high resolution vapor flux modulation, nanoscale structure v vi probes and growth simulations. The methodology is deployed to study the immiscible Ag-Cu and miscible Ag-Au model systems, for which it...

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Biaxially Textured Al Film Growth on CaF₂ Nanostructures toward a Method of Preparing Single-Crystalline Si Film on Glass Substrates

Cited by 10 publications

References 31 publications

Incident flux angle induced crystal texture transformation in nanostructured molybdenum films

Incident flux angle induced crystal texture transformation in nanostructured molybdenum films

Double in-plane alignment in biaxially textured thin films

Nanoscale structure forming processes : Metal thin films grown far-from-equilibrium

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Biaxially Textured Al Film Growth on CaF2 Nanostructures toward a Method of Preparing Single-Crystalline Si Film on Glass Substrates

Cited by 10 publications

References 31 publications

Incident flux angle induced crystal texture transformation in nanostructured molybdenum films

Incident flux angle induced crystal texture transformation in nanostructured molybdenum films

Double in-plane alignment in biaxially textured thin films

Nanoscale structure forming processes : Metal thin films grown far-from-equilibrium

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Product

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Biaxially Textured Al Film Growth on CaF₂ Nanostructures toward a Method of Preparing Single-Crystalline Si Film on Glass Substrates