BiCMOS microfluidic sensor for single cell label-free monitoring through microwave intermodulation

Abstract

A novel microfluidic biosensing platform based on Bipolar-Complementary Oxide Semiconductor (BiCMOS) technology is presented. The device relies on a quadruple electrode system and a microfluidic channel that are directly integrated into the back-end-of-line (BEOL) of the BiCMOS stack. For proof of concept repeatable electrical trapping of single SW620 (colon cancer) cells in the quadruple electrode system is initially demonstrated. Additionally, for the first time a microwave intermodulation technique is used for high sensitivity dielectric spectroscopy, which could pave the way to label-free monitoring of intracellular processes and manipulation such as electroporation.

Integrated Millimeter-Wave and Terahertz Analyzers for Biomedical Applications

“…17(b) and (c)] could be detected. Alternative approaches for the integration of the micro-channels include additional oxide deposition in combination with deep reactive ion-etched channels [123].…”

BiCMOS Integrated Microfluidic Packaging by Wafer Bonding for Lab-on-Chip Applications

“…Typically poly-dimethyl-siloxane (PDMS) [11] is etched and bonded with the help of oxygen plasma [12] or di-rectly molded [13] on to Si circuit chips, in order to create microfluidic channels. Although these methods are fast and cost effective, the yield and the chemical stability against solvents which can be used in the microfluidic channels are the main drawbacks limiting the applications.…”