Recent decades have seen significant advancements in integrated
photonics, driven by improvements in nanofabrication technology. This
field has been developed from integrated semiconductor lasers and
low-loss waveguides to optical modulators, enabling the creation of
sophisticated optical systems on a chip-scale capable of performing
complex functions such as optical sensing, signal processing, and
metrology. The tight confinement of optical modes in photonic
waveguides further enhances the optical nonlinearity, leading to a
variety of nonlinear optical phenomena such as optical frequency
combs, second-harmonic generation, and supercontinuum generation.
Active tuning of photonic circuits not only is crucial for offsetting
variations caused by fabrication in large-scale integration but also
serves as a fundamental component in programmable photonic circuits.
Piezoelectric actuation in photonic devices offers a low-power,
high-speed solution and is essential in the design of future photonic
circuits due to its compatibility with materials such as Si and
Si3N4, which do not exhibit electro-optic
effects. Here, we provide a detailed review of the latest developments
in piezoelectric tuning and modulation by examining various
piezoelectric materials, actuator designs tailored to specific
applications, and the capabilities and limitations of current
technologies. In addition, we explore the extensive applications
enabled by piezoelectric actuators, including tunable lasers,
frequency combs, quantum transducers, and optical isolators. These
innovative ways of managing photon propagation and frequency on-chip
are expected to be highly sought after in the future advancements of
advanced photonic chips for both classical and quantum optical
information processing and computing.