2023
DOI: 10.1364/ao.496511
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Bilayer and trilayer X-ray mirror coatings containing W, Pt, or Ir<?oxy_insert_start author="CKapler" timestamp="20231211T162235-0500"?>,<?oxy_insert_end?> in combination with C, C/Co, B4C, or B4C/Ni: X-ray reflectance, film stress, and temporal stability

David L. Windt,
Raymond P. Conley,
Eric M. Gullikson
et al.

Abstract: X-ray reflectance and film stress were measured for 12 bilayer and trilayer reflective interference coatings and compared with a single-layer Ir coating. The interference coatings comprise a base layer of W, Pt, or Ir, top layers of either C or B4C, and, in the case of the trilayer coatings, middle layers of either Co or Ni. The coatings were deposited by magnetron sputtering. Film stress was measured using the wafer curvature technique, while X-ray reflectance was measured a… Show more

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