Binary C-Ag Plasma Breakdown and Structural Characterization of the Deposited Thin Films by Thermionic Vacuum Arc Method

Mandes, Aurelia; Vladoiu, R.; Dinca, Virginia; Prodan, G.

doi:10.1109/tps.2014.2323086

Cited by 9 publications

(9 citation statements)

References 3 publications

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“…Similar tribological behavior Ag-DLC films are reported in [94]. The silver/amorphous carbon, Ag/a-C, nanocomposite thin films on Si, glass, and stainless steel OLC45 were deposited and studied [95]. The authors used a single electron gun system and both the C and Ag materials were placed as grains into one tungsten crucible.…”

Section: Low-friction Coatingsmentioning

confidence: 66%

Thermionic Vacuum Arc—A Versatile Technology for Thin Film Deposition and Its Applications

et al. 2020

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This review summarizes the more-than-25-years of development of the so-called thermionic vacuum arc (TVA). TVA is an anodic arc discharge in vapors of the material to be deposited; the energy for its melting is delivered by means of a focused electron beam. The resulting material ions fall at the substrate where they form a well-adhesive layer; the ion energy is controllable. The deposited layers are, as a rule, free from droplets typical for cathodic arc deposition systems and the thermal stress of the substrates being coated is low. TVA is especially suitable for processing refractory metals, e.g., carbon or tungsten, however, in the course of time, various useful applications of this system originated. They include layers for fusion application, hard coatings, low-friction coatings, biomedical-applicable films, materials for optoelectronics, and for solid-state batteries. Apart from the diagnostic of the film properties, also the diagnostic of the TVA discharge itself as well as of the by TVA generated plasma was performed. The research and application of the TVA proceeds in broad international collaboration. At present, the TVA technology has found its firm place among the different procedures for thin film deposition.

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Section: Low-friction Coatingsmentioning

confidence: 66%

Thermionic Vacuum Arc—A Versatile Technology for Thin Film Deposition and Its Applications

et al. 2020

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“…The TVA method uses an electron beam emitted by an externally heated cathode accelerated by a high anodic voltage [27][28][29]. A Wehnelt cylinder is used to focus the electrons on the anode surface.…”

Section: Methodsmentioning

confidence: 99%

The Properties of Binary and Ternary Ti Based Coatings Produced by Thermionic Vacuum Arc (TVA) Technology

et al. 2018

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A series of the multicomponent thin films (binary: Ti-C; Ti-Ag and ternary: Ti-C-Ag; Ti-C-Al) were fabricated by Thermionic Vacuum Arc (TVA) technology in order to study the wear resistance and the anticorrosion properties. The effects of Ti amount on the microstructure, tribological and morphological properties were subsequently investigated. TVA is an original deposition method using a combination of anodic arc and electron gun systems for the growth of films. The samples were characterized using scanning electron microscope (SEM) and a transmission electron microscope (TEM) accompanied by selected area electron diffraction (SAED). Tribological properties were studied by a ball-on-disc tribometer in the dry regime and the wettability was assessed by measuring the contact angle with the See System apparatus. Wear Rate results indicate an improved sliding wear behavior for Ti-C-Ag: 1.31 × 10 −7 mm 3 /N m (F = 2 N) compared to Ti-C-Al coating wear rate: 4.24 × 10 −7 mm 3 /N m. On the other hand, by increasing the normal load to 3 N an increase to the wear rate was observed for Ti-C-Ag: 2.58 × 10 −5 mm 3 compared to 2.33 × 10 −6 mm 3 for Ti-C-Al coating.

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“…This type of deposition ensured high-quality films with a comparatively high deposition rate due to the bombardment of the growing layer by energetic ions of the same material in vacuum conditions. Detailed TVA setup was previously reported [16,17].…”

Section: Synthesis Of Ti-based Nanocomposite Filmsmentioning

confidence: 99%

Synthesis and Characterization of Complex Nanostructured Thin Films Based on Titanium for Industrial Applications

et al. 2020

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Titanium-based composites—titanium and silver (TiAg) and titanium and carbon (TiC)—were synthesized by the Thermionic Vacuum Arc (TVA) method on substrates especially for gear wheels and camshaft coating as mechanical components of irrigation pumps. The films were characterized by surface morphology, microstructure, and roughness through X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), and Small-Angle Neutron Scattering (SANS). The silver (Ag) films crystallized into a cubic system with lattice a = 4.0833 Å at room temperature, indexed as cubic Ag group Fm3m. The crystallites were oriented in the [111] direction, and mean grain size was <D>111 = 265 Å. The TiC structure revealed a predominant cubic TiC phase, with a = 0.4098 as a lattice parameter determined by Cohen’s method. Average roughness (Ra) was 8 nm for the as-grown 170 nm thick TiAg film, and 1.8 nm for the as-grown 120 nm thick TiC film. Characteristic SANS contribution was detected from the TiAg layer deposited on a substrate of high-quality stainless steel with 0.45% carbon (OLC45) in the range of 0.015 Å−1 ≤ Q ≤ 0.4 Å−1, revealing the presence of sharp surfaces and an averaged triaxial ellipsoidal core-shell object.

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Binary C-Ag Plasma Breakdown and Structural Characterization of the Deposited Thin Films by Thermionic Vacuum Arc Method

Cited by 9 publications

References 3 publications

Thermionic Vacuum Arc—A Versatile Technology for Thin Film Deposition and Its Applications

Thermionic Vacuum Arc—A Versatile Technology for Thin Film Deposition and Its Applications

The Properties of Binary and Ternary Ti Based Coatings Produced by Thermionic Vacuum Arc (TVA) Technology

Synthesis and Characterization of Complex Nanostructured Thin Films Based on Titanium for Industrial Applications

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