Bio-inspired Flexible Airflow Sensor with Self-bended 3D Hair-like Configurations

Shen, Dawei; Jiang, Yonggang; Ma, Zhiqiang; Zhao, Peng; Gong, Zheng; Dong, Zihao; Zhang, Deyuan

doi:10.1007/s42235-021-00110-y

Cited by 14 publications

(17 citation statements)

References 30 publications

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“…Although the long history of MEMS technology lays a consolidated foundation for polyimide fabrication, new fabrication approaches, such as the EBD of polyimide nanocomposite films, FEP-based polyimide bon ding, and lab-on polyimide tubes, have emerged with innovation in material science and rapid progress in flexible electronics. The technological challenges include the 162 . b 3D origami structures by leading the light field to nonuniform curing of the polymer resin 166 .…”

Section: Discussionmentioning

confidence: 99%

“…Shen et al proposed self-bended 3D hair-like polyimide/silicon curved cantilevers for airflow sensing (Fig. 10a ) 162 . In their study, the curvature of the self-bended cantilevers is modified by the thickness of the sputtered silicon layer.…”

Section: Microfabrication Of 3d Polyimide Structuresmentioning

confidence: 99%

“…10 Polyimide 3D structures . a Bending of the polyimide/silicon cantilever 162 . b 3D origami structures by leading the light field to nonuniform curing of the polymer resin 166 .…”

Section: Microfabrication Of 3d Polyimide Structuresmentioning

confidence: 99%

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Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Dong

Shen

et al. 2023

Microsyst Nanoeng

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Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. However, enabling technologies, such as laser-induced graphene on polyimide, photosensitive polyimide micropatterning, and 3D polyimide microstructure assembly, have not been reviewed from the perspective of polyimide microfabrication. The aims of this review are to systematically discuss polyimide microfabrication techniques, which cover film formation, material conversion, micropatterning, 3D microfabrication, and their applications. With an emphasis on polyimide-based flexible MEMS devices, we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field.

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Section: Discussionmentioning

confidence: 99%

Section: Microfabrication Of 3d Polyimide Structuresmentioning

confidence: 99%

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Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Dong

Shen

et al. 2023

Microsyst Nanoeng

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“…In S10 of ESI, † we compare the performances of the proposed BSBA and other MEMS piezoresistive airflow sensors using indicators, including the sensing unit number, sensitivity, sensing range, response time, and bi-directional sensing capability. 13,20,[27][28][29][30] The BSBA outperforms conventional airflow sensors that require additional sensing units to achieve bi-directional airflow detection due to the inconsistent response of curved microcantilevers to positive and negative stimuli. Unlike other MEMS piezoresistive flow sensors, the enlarged center and bioinspired CTS on the cruciform beam enable bi-directional airflow detection consistently using a single BSBA sensor.…”

Section: Performance Characterization Of Bsbamentioning

confidence: 99%

“…Another approach involves adding commercial sensor arrays to detect airflow information from multiple directions. 6,[19][20][21] However, these sensors are bulky, heavy, and consume excessive power. They are difficult to install on modern, multi-functional lightweight quadrotors that are increasingly miniaturized.…”

Section: Introductionmentioning

confidence: 99%

Bio-inspired, sensitivity-enhanced, bi-directional airflow sensor for turbulence detection

Liu,

Zhao,

Xie

et al. 2024

Nanoscale

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Flexible Hair‐Like Piezoelectric Acoustic Particle Velocity Sensor with Enhanced Sensitivity for Speaker Recognition

Jin,

Cao,

Sheng

et al. 2024

Adv Funct Materials

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Flexible resonant acoustic sensors exhibit enhanced sensitivity near their resonant frequencies and have attracted increasing interest as essential components for next‐generation human‐machine speech interactions. However, membrane‐based resonant acoustic sensors are bulky owing to the inherently high bending stiffness of the sensing membrane. Inspired by the tiny hair‐based sensitive acoustic receptors of spiders, this study reports a hair‐like piezoelectric resonant acoustic particle velocity sensor (HP‐APVS) that enables highly sensitive sound sensing with a significantly reduced size. The HP‐APVS device is essentially a polyimide cantilever array fabricated using Nb0.02‐Pb(Zr0.6Ti0.4)O3 (PZT) on polyimide and self‐bending processes. The experimental results demonstrate that the HP‐APVS shows a linear response to acoustic particle velocity instead of acoustic pressure, with enhanced sensitivity in the resonance mode. Additionally, the proposed HP‐APVS exhibits an outstanding speaker recognition rate of 95.3% with an error rate reduction of 75% compared with that of a reference commercial microphone, indicating many potential applications in the realms of biometric authentication, voice user interfaces, and other intelligent acoustic electronics.

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Bio-inspired Flexible Airflow Sensor with Self-bended 3D Hair-like Configurations

Cited by 14 publications

References 30 publications

Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Bio-inspired, sensitivity-enhanced, bi-directional airflow sensor for turbulence detection

Flexible Hair‐Like Piezoelectric Acoustic Particle Velocity Sensor with Enhanced Sensitivity for Speaker Recognition

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