2015
DOI: 10.1088/0964-1726/24/12/125025
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Bio-inspired piezoelectric artificial hair cell sensor fabricated by powder injection molding

Abstract: A piezoelectric artificial hair cell sensor was fabricated by the powder injection molding process in order to make an acoustic vector hydrophone. The entire process of powder injection molding was developed and optimized for PMN-PZT ceramic powder. The artificial hair cell sensor, which consists of high aspect ratio hair cell and three rectangular mechanoreceptors, was precisely fabricated through the developed powder injection molding process. The density and the dielectric property of the fabricated sensor … Show more

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Cited by 16 publications
(5 citation statements)
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“…This renders mechanosensitive hairs as a potentially excellent candidate for vibration sensors. One strategy using the degree of deflection in hairs is the electrical responses of resistive materials, such as carbon nanotube (CNT) hairs, piezoelectric wires, polymer nanoarrays, silicon wires, and magnetic microwires . Mechanical stiffness is controlled by dimensions, allowing tunable sensing ranges and sensitivity .…”
Section: Auditory Sensory System‐inspired Electronicsmentioning
confidence: 99%
“…This renders mechanosensitive hairs as a potentially excellent candidate for vibration sensors. One strategy using the degree of deflection in hairs is the electrical responses of resistive materials, such as carbon nanotube (CNT) hairs, piezoelectric wires, polymer nanoarrays, silicon wires, and magnetic microwires . Mechanical stiffness is controlled by dimensions, allowing tunable sensing ranges and sensitivity .…”
Section: Auditory Sensory System‐inspired Electronicsmentioning
confidence: 99%
“…For a solvent debinding process, specimens were immersed in 45 °C n-hexane for 12 h. After solvent debinding, specimens were heated to thermal debinding temperature. Under optimized conditions in our previous works for debinding optimization [9], PP and PE were completely removed. Last step is the sintering of PZT ceramics.…”
Section: Pim Process For Micro Pzt Rod Arraymentioning
confidence: 99%
“…Innovative applications which was impossible to fabricate in previous manufacturing technology can be fabricated. Three-dimensional curved structure can be commercialized under convergence of production and acoustic design [9].…”
Section: Introductionmentioning
confidence: 99%
“…Also, complex structures can be manufactured with the benefits from fast developed micro-nano machining technology. Hence, advanced piezoelectric materials combined with advanced design methodology can ensure broad potential applications of hairlike sensors in acoustic [17,18], tactile [11] and flow [31][32][33][34][35][36][37] detection. For low-frequency acoustic and fluidic signals, the sensitivity of polyester (vinylidene fluoride) nanofiber webs can reach up to 266 mV Pa −1 [14].…”
Section: Introductionmentioning
confidence: 99%