2015
DOI: 10.1088/0960-1317/25/5/055002
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Biocompatible circuit-breaker chip for thermal management of biomedical microsystems

Abstract: This paper presents a thermoresponsive micro circuit breaker for biomedical applications specifically targeted at electronic intelligent implants. The circuit breaker is micromachined to have a shape-memory-alloy cantilever actuator as a normally closed temperature-sensitive switch to protect the device of interest from overheating, a critical safety feature for smart implants including those that are electrothermally driven with wireless micro heaters. The device is fabricated in a size of 1.5  ×  2.0  ×  0.4… Show more

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Cited by 16 publications
(12 citation statements)
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“…MEMS transducers and other microsystems offer a practical path to realizing electro thermally active stents with temperature regulation and controls, which enable their reliable and safe use in endohyperthermia treatments of restenosis [ 44 , 101 ].…”
Section: In-stent Restenosis Treatmentmentioning
confidence: 99%
“…MEMS transducers and other microsystems offer a practical path to realizing electro thermally active stents with temperature regulation and controls, which enable their reliable and safe use in endohyperthermia treatments of restenosis [ 44 , 101 ].…”
Section: In-stent Restenosis Treatmentmentioning
confidence: 99%
“…1). The breaker design of this chip is based on its earlier prototype without the integrated on-chip capacitor [24]. The Nitinol structure is designed to have the flat state as the memorized shape, which is restored when temperature of the material is elevated to exceed the threshold level.…”
Section: Working Principle and Device Designmentioning
confidence: 99%
“…2 exhibits an out-of-plane displacement of 174.3 μm at its free end. Further information in modeling and simulation results of the cantilever can be found in [24].…”
Section: Working Principle and Device Designmentioning
confidence: 99%
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