Biomimetic Design and Fabrication of Components for Artificial Hair Cell Sensor

Lee, H.S.; Lee, B.-K.; Kwon, Tae-Young

doi:10.1109/memsys.2009.4805501

Cited by 1 publication

(1 citation statement)

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“…Also, the micromold for the complete microstructure is easily achieved by assembling the fabricated micromold modules. The SMS developed in the present study aims at replicating high aspect ratio polymeric micro-scale cilium for biomimetic sensor applications (Lee et al 2009). For this purpose, two identical micromold modules having a half circular microstructure were realized by the deep X-ray lithography and the nickel electroforming processes.…”

Section: Introductionmentioning

confidence: 99%

Development of separated micromold system for an efficient replication of high aspect ratio microstructures

Lee

Kwon

2009

Microsyst Technol

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In the present study, a separated micromold system (SMS) is newly proposed and developed for an efficient replication of high aspect ratio microstructures. The present SMS basically consists of micromold modules, each having a split structure of the complete microstructure to be replicated. So fabricated micromold modules are assembled for a replication of the microstructures and subsequently separated in a demolding stage. In this manner, serious problems commonly encountered in a conventional fabrication process for high aspect ratio structures can be effectively overcome. For a precise fabrication of the micromold modules, a deep X-ray lithography and nickel electroforming processes were carried out, resulting in nickel SMS including various half circular microstructures. By utilizing the obtained SMS modules, high aspect ratio micro-scale cilium structure and its array were successfully replicated by a hot embossing process.

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Section: Introductionmentioning

confidence: 99%