Bistable microvalve with pneumatically coupled membranes

Wagner, Bernhard; Quenzer, Hans-Joachim; Hoerschelmann, S.; Lisec, T.; Juerss, M.

doi:10.1109/memsys.1996.494012

Cited by 64 publications

(40 citation statements)

References 10 publications

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“…In 1993, Bosch et al developed a hybrid electromagnetic and electrostatic valve for low pressure applications that consumed 50 mW of power when actuated, had a 0.4 ms response time and a leak rate of 0.01 sccm [3]. In 1996 Wagner et al investigated a valve based on two pneumatically-coupled membranes and electrostatic actuation [4]. When one electrode was pulled down electrostatically, the other was forced upward pneumatically.…”

Section: Open Accessmentioning

confidence: 99%

A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing

Potkay¹,

Wise

2012

Micromachines

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This paper presents a low-power hybrid thermopneumatic microvalve with an electrostatic hold and integrated valve plate position sensing. This combination of actuators in a single structure enables a high throw and force actuator with low energy consumption, a combination that is difficult to otherwise achieve. The completed 7.5 mm × 10.3 mm × 1.5 mm valve has an open flow rate of 8 sccm at 600 Pa, a leak rate of 2.2 × 10 −3 sccm at 115 kPa, a open-to-closed fluidic conductance ratio of nearly one million, an actuation time of 430 ms at 250 mW, and a required power of 90 mW while closed. It additionally requires no power to open, and has a built-in capacitive position sensor with a sensitivity of 9.8 fF/kPa. The paper additionally presents analytical models of the valve components, design tradeoffs, and guidelines for achieving an optimized device.

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Section: Open Accessmentioning

confidence: 99%

A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing

Potkay¹,

Wise

2012

Micromachines

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“…Consequently, the bistability of arches has been thoroughly studied in order to exploit them in useful applications [1][2][3][4][5][6][7][8][9][10]. For example, micro arches are used as microbridges [7], microvalves [11], microelectro switches or relays [12], logic memories [13], micromuscles [14], and micro-optical switches [15]. Micro arches were excited using various transduction methods including magnetic [6], electrostatic [10], and thermal methods [12].…”

Section: Introductionmentioning

confidence: 99%

Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch

Ramini

Hennawi

Younis

2016

J. Microelectromech. Syst.

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“…However, the application of this type of micropump is restricted due to its pulsating or periodic flow and low pump flux. Thus, the need to investigate multipump connection rises [6] to improve the pumps' characteristics, such as fine stability, high flow rate, and high pump pressure. Anders proposed a planar fluid pump with two pump chambers in brass [7].…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric diffuser/nozzle micropump with double pump chambers

Wang

Zhang

Liu

et al. 2008

Front. Mech. Eng. China

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To eliminate check valve fatigue and valve clogging, diffuser/nozzle elements are used for flow rectification in a valveless diffuser/nozzle micropump instead of valves. However, the application of this type of micropump is restricted because of its pulsating or periodic flow and low pump flux. In this paper, a diffuser/nozzle Si/ Glass micropump with two pump chambers by IC and MEMS technology is designed. The fabrication process requires only one mask and one etch step, so that the fabrication has the advantages of low cost, short processing period, and facilitation of miniaturization. The pump is equipped with a glass cover board so as to conveniently observe the flow status. Pump-chambers and diffuser elements are fabricated by the anisotropic KOH-etch technique on the silicone substrate, and the convex corner is designed to compensate for an anisotropic etch. The driving force of the micropump is produced by the PZT piezoelectric actuator. The pump performance with both actuators actuated in anti-or same-phase mode is also researched. The result indicates that the micropump achieves great performance with the actuators working at anti-phase. This may be because the liquid flows steadily, pulse phenomenon is very weak, and the optimal working frequency, pump back pressure, and flow rate are both double that of the pump driven in same-phase.

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Bistable microvalve with pneumatically coupled membranes

Cited by 64 publications

References 10 publications

A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing

A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing

Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch

Piezoelectric diffuser/nozzle micropump with double pump chambers

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