Articles you may be interested inOptical emission spectroscopy of microwave-plasmas at atmospheric pressure applied to the growth of organosilicon and organotitanium nanopowders Conversion of CH4/CO2 to syngas over Ni-Co/Al2O3-ZrO2 nanocatalyst synthesized via plasma assisted coimpregnation method: Surface properties and catalytic performance Powder formation in a 13.56-MHz radio frequency ͑rf͒ capacitive glow discharge plasma of silane-argon mixture has been studied by in situ laser light-scattering measurements. The rf power density ͑P rf ͒ was varied from 18 to 53 mW/ cm 2 . At high P rf the light scattering occurs all along the discharge and extends even beyond the exit end of the electrodes toward the pumping system. With decreasing P rf the maximum intensity of the light scattering decreases and the scattering zone shrinks and moves toward the exit end. With P rf Ϸ 20 mW/ cm 2 a very bright scattering zone only a few centimeters wide appears located at the electrodes outlet. The powders studied by transmission electron microscopy did not show a drastic decrease of their sizes with P rf though clear coagulation of small particles is observed at high P rf . In this paper we have tried to link the laser light-scattering evolution with P rf to various parameters such as the microstructure factor, the deposition rate, the electron mobilityϫ lifetime product, the density of states, and the minority-carriers diffusion length of the films in an attempt to link the effect the evolution of powder formation to the films properties.