Blast-wave studies of excimer laser ablation of ZnS

Dyer, P. E.; Key, P.H.; Sands, David; Snelling, H.V.; Wagner, F.

doi:10.1016/0169-4332(94)00400-5

Cited by 19 publications

(12 citation statements)

References 1 publication

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“…Also, the surface profile of the original material may have generated localized changes in the beam incident angle; thus modifying the local trajectory of the debris. Finally, the material composition of the polycarbonate will not be completely homogeneous across the whole image; thus some areas within the image may produce more Both of these results are contrary to expectation; however, large intermediate debris also occurs in increased concentration along the horns, suggesting that debris is transported on the edge of the ablation plume, providing support for the theories of Dyer and co-workers [13,[15][16][17]37].…”

Section: Circular Feature Geometrycontrasting

confidence: 56%

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Use of thin laminar liquid flows above ablation area for control of ejected material during excimer machining

Dowding

Lawrence

2009

Proceedings of the Institution of Mechanical Engineers, Part B:

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To observe excimer laser machining through thin liquid films and the effects thereof on debris control, equipment was designed to contain a small control volume that can be supplied with a laminar thin film of DI water to flow over the workpiece. Using the same equipment, comparison with non-liquid ablation was possible. Reliable calculations of the debris size and density with respect to the distance from the centre of the shot, as well as the identification of modal trends in the dispersion of the debris were obtained from analysis of microscope images with graphical analysis software. The results suggest that the positional debris deposition of samples machined in ambient air show modal tendency reliant on the feature shape machined and according to species size. This is proposed to be due to the interaction of multiple shockwaves at the extent of ablation plumes generated at geometry specific locations in the feature. Debris is deposited where the shockwaves collide. Large debris did not typically travel much further than the boundary of the machined feature, whereas intermediate debris was found in radial streaks at a normal to the circular feature’s perimeter. Laminar flows of liquid have shown potential to modify the end position and typical size of the debris produced, as well as increased homogeneity of deposition density. The use of immersion has reduced typical range by 17%, and the deposition within the boundary of the ablation plume has a comparatively even population density with respect to the sample machined in ambient air. Outside the ablation plume extents, evidence of positional control of deposited debris species by laminar flow DI water immersion is shown by debris deposition in rippled flow line patterns for both circular and square features, indicating the action of transport by fluid flow. A typical increase in debris size by an order of magnitude when using DI water as an immersing liquid has been measured, a result that is in line with a colloidal interaction response

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Section: Circular Feature Geometrycontrasting

confidence: 56%

“…The first, denoted t v in Fig. 2, is the acceleration of the particle by expanding gas produced during ablation [13,[15][16][17]37], the second phase, denoted t rec in Fig. 2, is the deceleration of the particle by recoil condensation of the gas after ablation has ended [15], immediately following the initial phase.…”

Section: Explosion Mechanicsmentioning

confidence: 99%

Use of thin laminar liquid flows above ablation area for control of ejected material during excimer machining

Dowding

Lawrence

2009

Proceedings of the Institution of Mechanical Engineers, Part B:

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“…Such observations have been done for large spot diameter at the sample surface. 37 At larger times, we expect the plane wave to turn into a spherical wave, and even a sound wave. Velocities of the plume at different times are presented on Figure 8.…”

Section: Plume Thermodynamics and Compositionmentioning

confidence: 99%

1D modelling of nanosecond laser ablation of copper samples in argon at P = 1 atm with a wavelength of 532 nm

Clair

L’Hermite

2011

Journal of Applied Physics

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Proof of damage-free selective removal of thin dielectric coatings on silicon wafers by irradiation with femtosecond laser pulses J. Appl. Phys. 112, 023521 (2012) Stand-off filament-induced ablation of gallium arsenide Appl. Phys. Lett. 101, 034101 (2012) Laser induced modification and ablation of InAs nanowires J. Appl. Phys. 111, 094316 (2012) Effects of laser energy and impact surface on the stopping distance in metal oxide targets laser ablation J. Appl. Phys. 111, 063301 (2012) CO2 laser pulse shortening by laser ablation of a metal target Rev. Sci. Instrum. 83, 035102 (2012) Additional information on J. Appl. Phys.A one-dimensional model is developed for nanosecond laser ablation of a metal target (Cu) in a background gas (Ar) at any pressure. Simulations are performed with a 6 ns FWHM Gaussian laser pulse at 532 nm with a fluence of 11.3 J.cm À2 . Heating, melting, evaporation, and condensation are considered to model the laser-target interaction. Expansion of the plume is investigated solving the Euler equations in a lagrangian formalism. Plasma formation is taken into account by computing the ionic species densities up to the second order of ionization in both the ablated material and the background gas. Such formation implies a strong laser-plasma interaction, assuming that the absorption phenomena are photoionization, electron-atom, and electron-ion inverse Bremsstrahlung. Radiative losses are supposed to be only described by electron-ion Bremsstrahlung. Preliminary results are presented and discussed.

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“…Kelly and Braren 15 first proposed the contact surface and expansion front associated with laser ablation. Kelly et al 16 and Dyer et al 17 showed the two-layered structure of the laser induced plume using a probe laser photograph. Jeong, Greif, and Russo 18 showed the existence of a contact surface by obtaining the structure of the laser induced plume numerically.…”

Section: Introductionmentioning

confidence: 98%

Theory of shock wave propagation during laser ablation

Zhang

Gogos

2004

Phys. Rev. B

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Laser ablation consists of three coupled processes: (i) heat conduction within the solid, (ii) flow through a discontinuity layer (evaporation wave) attached to the solid surface, and (iii) shock wave expansion of the laser induced plume. In this paper, a one-dimensional solution for all three coupled processes is presented. The heat conduction and the evaporation wave are solved numerically. The shock wave expansion of the laser induced plume, however, is solved analytically, to our knowledge, for the first time; analytical solutions for the classic Riemann problem have been employed to solve the transient propagation of the strong shock wave. This model provides a sound theoretical basis for the analysis of the laser ablation process. The temperature, pressure, density, and velocity of the laser induced plume at different laser intensities, back temperatures, back pressures, and ambient gas species are calculated. The effects of the laser intensity, back temperature, back pressure, and ambient gas species are analyzed. The theoretical results provide insight into experimental results available in the literature.

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Blast-wave studies of excimer laser ablation of ZnS

Cited by 19 publications

References 1 publication

Use of thin laminar liquid flows above ablation area for control of ejected material during excimer machining

Use of thin laminar liquid flows above ablation area for control of ejected material during excimer machining

1D modelling of nanosecond laser ablation of copper samples in argon at P = 1 atm with a wavelength of 532 nm

Theory of shock wave propagation during laser ablation

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