Blazed gratings and Fresnel lenses fabricated by electron-beam lithography

Abstract

A blazing technique using electron-beam lithography to achieve higher efficiency of gratings and Fresnel lenses is described. Transmission-type blazed gratings have been formed in polymethyl methacrylate films. As a result of measurement, we found that their diffraction efficiency of the first order in these gratings amounts to as much as 60 to 70% at 0.633 microm. Fresnel lenses of 1-mm diameter and 5-mm focal length, which have a sawtooth relief profile, have been also fabricated, and the experimental results showed high-efficiency performance (about 50%) and nearly diffraction-limited focusing.

3D printed optics with nanometer scale surface roughness

“…Complex to fabricate optical devices [8][9][10] and systems can similarly benefit from the ability of 3D printing to create low-cost structures of nearly arbitrary shape 11,12 . Optical designs are often complicated by the need to conform to shape constraints imposed by fabrication technologies, e.g., spherically polished lenses, flat imagers, and shapes that can be efficiently molded and cast.…”

Study of Liquid Crystal on Silicon Displays for Their Application in Digital Holography

“…In this subsection, we compare the efficiency of a basic continuous digital hologram, the blazed grating (Fujita et al, 1982), generated with our PALCoS display when uploading the different electrical sequences (i.e. sequences #1, #2 and #3).…”

Fabrication of eight-step diffractive optical element for hologram-ROM

“…The sample was installed in a scanning electron microscope (SEM) with an EB writing system (ERA-8800FE; Elionix Co., Tokyo). Then, without moving the SEM stage, the sample was exposed seven times to various EB doses [11], and designed patterns were produced by a 20-kV EB spot with a current of 50 pA. The reflective-type CGH pattern was prepared previously by means of the Gerchberg-Saxton algorithm in conjunction with the angular spectrum method [3,12].…”