Blister-based-laser-induced-forward-transfer: a non-contact, dry laser-based transfer method for nanomaterials

Goodfriend, Nathan; Do, Syou-P. 'heng; Nerushev, Oleg; Gromov, Andrey; Bulgakov, Alexander V.; Okada, Mitsuhiro; Xu, Wenshuo; Kitaura, Ryo; Warner, Jamie H.; Shinohara, Hisanori; Campbell, Eleanor E. B.

doi:10.1088/1361-6528/aaceda

Cited by 18 publications

(6 citation statements)

References 23 publications

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“…The LIFT approach has a long history and an impressive record of printing a broad range of materials e.g. metals [17], fullerene (C 60 ) crystallites, carbon nanotubes [18], polymer/carbon nanotube composites [19] and graphene oxide films [20]. In this relatively simple one-step process a laser pulse can force a controlled amount of the material of interest to detach from a so-called donor substrate (or, simply, donor) and be transferred to a receiver substrate forming pixels whose size and form are determined by the geometrical features of the laser spot.…”

Section: Introductionmentioning

confidence: 99%

A direct transfer solution for digital laser printing of CVD graphene

et al. 2021

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State-of-the-art methods for printing highly resolved pixels of two-dimensional (2D) materials on technologically important substrates typically involve multiple and time-consuming processing steps which increase device fabrication complexity and the risk of impurity contamination. This work introduces an alternative printing approach based on the laser induced forward transfer (LIFT) technique for the successful digital transfer of graphene, the 2D material par excellence. Using LIFT, CVD graphene pixels of 30 μm × 30 μm in size are transferred on SiO2/Si and flexible polymer substrates. The potential of upscaling this novel approach by reaching sizes of up to 300 μm × 300 μm for transferred graphene patches is also demonstrated. The feasibility of laser-induced transfer of graphene is corroborated with ab initio molecular dynamics simulations which elucidate atomic-scale details of the seamless detachment of the monolayer from a metallic donor surface and its subsequent attachment to a receiver substrate.

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Section: Introductionmentioning

confidence: 99%

A direct transfer solution for digital laser printing of CVD graphene

et al. 2021

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“…Finally, a number of groups have recently demonstrated a novel way of transferring graphene across an air gap by focusing a laser pulse onto a graphene-coated substrate (Figure 9) [94][95][96][97][98]. A disk of graphene at the highest-fluence area on the substrate detaches and is pushed onto a new substrate.…”

Section: Laser-assisted Methodsmentioning

confidence: 99%

Graphene Transfer: A Physical Perspective

Langston

Whitener

2021

Nanomaterials

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Graphene, synthesized either epitaxially on silicon carbide or via chemical vapor deposition (CVD) on a transition metal, is gathering an increasing amount of interest from industrial and commercial ventures due to its remarkable electronic, mechanical, and thermal properties, as well as the ease with which it can be incorporated into devices. To exploit these superlative properties, it is generally necessary to transfer graphene from its conductive growth substrate to a more appropriate target substrate. In this review, we analyze the literature describing graphene transfer methods developed over the last decade. We present a simple physical model of the adhesion of graphene to its substrate, and we use this model to organize the various graphene transfer techniques by how they tackle the problem of modulating the adhesion energy between graphene and its substrate. We consider the challenges inherent in both delamination of graphene from its original substrate as well as relamination of graphene onto its target substrate, and we show how our simple model can rationalize various transfer strategies to mitigate these challenges and overcome the introduction of impurities and defects into the graphene. Our analysis of graphene transfer strategies concludes with a suggestion of possible future directions for the field.

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“…At least partly to mitigate these two major disadvantages of ablative placement (debris and high impact force), Uniqarta introduced their blister-based process. 14 However, as noted by Chen 7 , the velocity can still be quite high (>>1 m/s). The blister shape also limits placement accuracy, and makes it very difficult to transfer true microLEDs.…”

Section: Introductionmentioning

confidence: 93%

Patterning processes with thermally decomposable polymers

Sheats,

Robinson,

Steinschreiber

et al. 2024

Novel Patterning Technologies 2024

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Microlithography has traditionally involved a photoinduced solubility change, necessitating a solvent development step. Self-developing resists, in which photolysis results in volatile products, were pioneered in the 1980s but they failed to find commercial traction due in part to fear of contaminating expensive high-resolution projection optics. We have adapted similar chemistry for three applications: high-throughput placement of very large arrays of entire components, such as semiconductor chiplets and microLEDs; direct-write photolithography with thermal development; and a nanoscale-resolution lithography tool based on a modified AFM tip with controlled heating. In the first system, decomposition to small gaseous molecules in a short (of the order of microseconds) time propels the component onto a target substrate. Lithography requires in particular high contrast and stable post-development features. For the third case, decomposition must be endothermic, devoid of residue upon the application of heat, and responsive to both pressure and temperature. Promising results have been obtained for each.

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Blister-based-laser-induced-forward-transfer: a non-contact, dry laser-based transfer method for nanomaterials

Cited by 18 publications

References 23 publications

A direct transfer solution for digital laser printing of CVD graphene

A direct transfer solution for digital laser printing of CVD graphene

Graphene Transfer: A Physical Perspective

Patterning processes with thermally decomposable polymers

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