2014
DOI: 10.5573/jsts.2014.14.1.053
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Blistering Induced Degradation of Thermal Stability Al2O3Passivation Layer in Crystal Si Solar Cells

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Cited by 12 publications
(6 citation statements)
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“…However, literature in low thermal budget annealing process using RTP with less annealing time is very few. 9,26 In this paper, a systematic study is made wherein Al 2 O3 films are deposited using thermal ALD process at different deposition temperature. The influence of T dep on silicon surface passivation properties is investigated.…”
Section: 2mentioning
confidence: 99%
“…However, literature in low thermal budget annealing process using RTP with less annealing time is very few. 9,26 In this paper, a systematic study is made wherein Al 2 O3 films are deposited using thermal ALD process at different deposition temperature. The influence of T dep on silicon surface passivation properties is investigated.…”
Section: 2mentioning
confidence: 99%
“…2c presents the O1s spectra. For all samples, O1s spectra can be deconvoluted into three peaks at 530.4, 531.5 and 532.6 eV, ascribed to chemisorbed oxygen species, 20 Al-O 21 and OH, 22 respectively. The ratios of chemisorbed oxygen species in O1s for the samples were also summarized in Table 1.…”
mentioning
confidence: 99%
“…Increased blistering has been found to correlate with degraded surface passivation and decreased open-circuit voltage (V oc ) in silicon solar cells. [101,102,103,104] In a complex segmented device, such as a pixel detector, ruptured blisters pose a severe risk of short-circuits between elements in the detector, which may render the device non-functional. An example of blistering between segments can be seen in Fig.…”
Section: Blistering Of Al 2 Omentioning
confidence: 99%