Block phase correlation-based automatic drift compensation for atomic force microscopes

Qinmin, Yang; Jagannathan, S.; Bohannan, Eric W.

doi:10.1109/nano.2005.1500773

Cited by 13 publications

(5 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Fortunately, it is usually relatively small (as small as 0.005nm/s [27]) and has little impact on nanomanipulation; moreover, it can be well compensated by the z feedback system. Thus it is normally sufficient to deal with drift in the x and y directions under the existence of drift in z direction, so the nanomanipulation could be performed as if the drift does not exist.…”

Section: Drift Compensation Methodsmentioning

confidence: 99%

See 1 more Smart Citation

Local scan for compensation of drift contamination in AFM based nanomanipulation

Wang

Liu

2009

2009 IEEE/RSJ International Conference on Intelligent Robots and Systems

View full text Add to dashboard Cite

Because of the presence of thermal drift, AFM (atomic force microscopy) images are always contaminated. Such contamination is one of the major hampers to achieve accurate and efficient AFM based nanomanipulation. Based on contaminated images, the manipulation operations often fail. In this paper, we apply a local scan method to identify and compensate the thermal drift contamination in the AFM image. After an AFM image is captured, the entire image is divided into several parts along y direction. A local scan is immediately performed in each part of the image to calculate the drift value at that very part. In this manner, the drift value is calculated in a small local area instead of the global image. Thus, the drift can be more precisely estimated and the image can be more accurately recovered, which lead to improved accuracy for AFM imaging and enhanced productivity for AFM based nanomanipulation.

show abstract

Section: Drift Compensation Methodsmentioning

confidence: 99%

“…Moreover, the correlation between two directions can be negligible [19]. While ignoring the drift long z direction, the height data between two successive scans in a same sample area can be expressed as [27] ) ,…”

Section: Drift Compensation Methodsmentioning

confidence: 99%

Local scan for compensation of drift contamination in AFM based nanomanipulation

Wang

Liu

2009

2009 IEEE/RSJ International Conference on Intelligent Robots and Systems

View full text Add to dashboard Cite

show abstract

“…The traditional ways to overcome these problems are inconvenient and inefficient, such as scanning image for a couple hours before manipulation to eliminate the influence aroused from the mechanical contraction and expansion, controlling the manipulation environment strictly to get rid of the influence from temperature and humidity. Model based estimation and compensation method are also developed to handle the bad effect from thermal drift, such as a Kalman filter is proposed in [5] and a neural network is suggested in [6]. However, this method are model based compensation, whether the compensation is successful or not lies on the degree of the model's accuracy, it is not easy and also takes time to obtain the accurate model parameters.…”

Section: Introductionmentioning

confidence: 99%

A probabilistic approach for on-line positioning in nano manipulations

Yuan

Liu

Wang

et al. 2010

2010 8th World Congress on Intelligent Control and Automation

View full text Add to dashboard Cite

Nanomanipulation and nanoassembly using atom force microscopy (AFM) is a potential and promising technology for nanomanufacturing. Precise position of the tip of AFM is important to increase the accuracy and efficiency on fabricate complex nanostructures. However at the nanoscale, it is difficult to acquire the tip position expressed by the coordinate in real time due to PZT nonlinearity and thermal drift through the general measure. In this paper, a probabilistic approach incorporating a Kalman filter based localization algorithm is introduced into the on-line estimation of the tip position expressed by probability distribution known as probability density function. A probabilistic motion model of AFM tip is introduced that consists of a PZT dynamic model based on the Prandtl-Ishlinskii (PI) model, and motion error distribution obtained from calibration experiments. An observation model by using a local scanning algorithm is proposed and the change of uncertainty distribution on scanning landmarks, e.g. nano-particles, near the target position is analyzed. Some experiment results are included for showing the motion error distribution and a simulation result is presented to illustrate the validity of the proposed method. Index Terms -AFM. Kalman Filter. Nanomanipulation. PI. Probability

show abstract

“…Due to lack of physical sensor that can sense the displacement between AFM tip and the substrate, there is no way to compensate the thermal drift in close-loop manner. It has to be handled through model based estimation and compensation, such as a Kalman filter is developed in [12] and a neural network is suggested in [13]. However, these methods are model based compensation, whether the compensation is successful or not lies on the degree of the model's accuracy, it is not easy and also takes time to obtain the accurate model parameters.…”

Section: Introductionmentioning

confidence: 99%

Landmark based sensing and positioning in robotic nano manipulation

Liu¹,

Wang³

et al. 2009

2008 IEEE International Conference on Robotics and Biomimetics

View full text Add to dashboard Cite

Abstract-AFM based nanomanipulation is still hindered by large spatial uncertainties encountered in tip positioning caused by PZT nonlinearity and thermal drift. In this paper, a landmark based positioning method is proposed to solve these problems. Its pivotal idea is that the tip position is described in a feature based landmark coordinate instead of length based Descartes coordinate. During manipulation, the landmarks selected from surface features, which is sensed through the new developed local scan method, acts as coordinate reference for tip localization. In this way, the positioning error aroused from PZT nonlinearity and thermal drift can be effectively suppressed. The details about landmark selecting, sensing, identifying will be discussed. Experiments of nanoparticle manipulation are presented to demonstrate the efficiency and effectiveness of the proposed method.

show abstract

Block phase correlation-based automatic drift compensation for atomic force microscopes

Cited by 13 publications

References 9 publications

Local scan for compensation of drift contamination in AFM based nanomanipulation

Local scan for compensation of drift contamination in AFM based nanomanipulation

A probabilistic approach for on-line positioning in nano manipulations

Landmark based sensing and positioning in robotic nano manipulation

Contact Info

Product

Resources

About