“…Gallium-indium alloys [2] have demonstrated excellent transmission in the infrared regime, and ZnGa 2 O 4 itself has been identified as a UV-transparent TCO [5,6]. Zincgallate thin films phase have been synthesized to date primarily by sputtering [5], laser ablation [7,8], and sol-gel techniques [9]. There is one report of chemical vapor deposition (CVD) synthesis [10], but we are not aware of attempts to deposit this material by plasma-enhanced chemical vapor deposition (PECVD).…”