Bonding of glass nanofluidic chips at room temperature by a one-step surface activation using an O2/CF4 plasma treatment

Xu, Yan; Wang, Chenxi; Li, Lixiao; Matsumoto, Nobuhiro; Jang, Kyung‐In; Dong, Yiyang; Mawatari, Kazuma; Suga, Tadatomo; Kitamori, Takehiko

doi:10.1039/c3lc41345d

Cited by 80 publications

(56 citation statements)

References 15 publications

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“…We utilized low‐temperature bonding in order to avoid heat‐associated destruction of functional molecules during thermal bonding. This method enables glass‐glass bonding at 25–100 °C by oxygen plasma surface activation involving fluorine.…”

Section: Resultsmentioning

confidence: 99%

“…After irradiation, the APTES‐patterned substrate was rinsed with ultrapure water and dried with flowing air. The substrate was bonded with another silica substrate including micro‐ and extended nanochannels in which the surfaces were activated with fluorine‐enhanced plasma, as previously reported . Briefly, after washing with piranha solution, the clean silica substrate with channels was placed in the plasma chamber and treated with fluorine‐containing oxygen plasma (60 Pa O 2 , 250 W power) for 40 sec.…”

Section: Methodsmentioning

confidence: 99%

“…After permanent glass bonding, patterning is difficult in the closed channels, which are not easily accessible from the outside. Low‐temperature (25–100 °C) bonding methods recently developed by our group avoid thermal destruction because the principle is based on chemical bonding between silanol groups without heat; however, the oxygen plasma irradiation surface activation process decreases the activity of modified functional molecules.…”

Section: Introductionmentioning

confidence: 99%

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Extended Nanofluidic Immunochemical Reaction with Femtoliter Sample Volumes

Shirai

Mawatari

Kitamori

2013

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The growing need to optimize immunoassay performance driven by interest in analyzing individual cells has resulted in a decrease in the amount of sample required. Miniaturized immunoassays that use ultra-small femtoliter to attoliter sample volumes, a range known as the extended nanospace, can satisfy this analytical need; however, capturing every targeted molecule without loss in extended nanochannels for subsequent detection remains challenging. This is the first report of a successful extended nanofluidics-based quantitative immunochemical reaction capable of high capture efficiency using a femtoliter-scale sample volume. A novel patterning method using a photolithographic technique with vacuum ultraviolet light and low-temperature (100 °C) bonding enables patterning of functional groups for antibody immobilization before bonding, resulting in an immunochemical reaction space of only 86 fL. Reaction rate analyses indicate a decrease in the required sample volume to 810 fL and improvement in the limit of detection to 3 zmol, 5-6 orders of magnitude better than possible with the microfluidic immunoassay format. Highly efficient (near 100%) immunochemical reactions on a seconds time scale are possible due to the nm-scale diffusion length, which should be advantageous for the analysis of ultra-low-volume samples.

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Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Extended Nanofluidic Immunochemical Reaction with Femtoliter Sample Volumes

Shirai

Mawatari

Kitamori

2013

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“…Howlader et al reported bonding strengths as high as 20 MPa by treating substrates with a sequential process of plasma activation steps (O 2 RIE and nitrogen radical treatment) prior to the bonding at room temperature [84]. Recently, one-step O 2 /CF 4 plasma treatment [85] and sodium silicate assisted bonding [86] have been reported for low-temperature bonding of glass substrates.…”

Section: Sealing Hard Surfaces Such As Si and Glassmentioning

confidence: 97%

Lab-on-a-chip devices: How to close and plug the lab?

Temiz

Lovchik

Kaigala

et al. 2015

Microelectronic Engineering

417

276

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a b s t r a c tLab-on-a-chip (LOC) devices are broadly used for research in the life sciences and diagnostics and represent a very fast moving field. LOC devices are designed, prototyped and assembled using numerous strategies and materials but some fundamental trends are that these devices typically need to be (1) sealed, (2) supplied with liquids, reagents and samples, and (3) often interconnected with electrical or microelectronic components. In general, closing and connecting to the outside world these miniature labs remain a challenge irrespectively of the type of application pursued. Here, we review methods for sealing and connecting LOC devices using standard approaches as well as recent state-of-the-art methods. This review provides easy-to-understand examples and targets the microtechnology/engineering community as well as researchers in the life sciences.

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“…Unlike glass-glass bonding, [79] for example, bonding LN to materials other than PDMS is difficult. Unlike glass-glass bonding, [79] for example, bonding LN to materials other than PDMS is difficult.…”

Section: Introductionmentioning

confidence: 99%

Acoustic Nanofluidics via Room‐Temperature Lithium Niobate Bonding: A Platform for Actuation and Manipulation of Nanoconfined Fluids and Particles

Miansari

Friend

2016

Adv Funct Materials

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7861wileyonlinelibrary.com and electrical double layer overlapping and its effect on charge permselectivity and electroosmosis must be taken into account. They are indeed essential for applications, for example, detection of individual DNA molecules, [11] DNA stretching analysis, [12] energy conversion/ storage, [13][14][15] water purification, [16,17] and the investigation of liquid properties, [18] all very difficult to achieve in a microfluidic platform. However, the large surface and viscous forces that resist fluid motion at very small scales are associated with a low Reynolds number in most micro-or nanofluidic systems. Such low Reynolds number hydrodynamics pose significant challenges, not the least of which are the low fluid transport speeds that undermine micropumping [19] and the difficulty in generating turbulent vortices and irregular fluid flow required for micromixing. [20,21] In addition, fluid in microchannels is often manipulated with hydrostatic pressure, achieving well-controlled fluid flow remains a challenge. [22][23][24] The scenario worsens when it comes to pressure-driven flow in nanochannels with the requirement of much higher pressure [25,26] to produce fluid flow due to the power-law relation between the pressure and the cross-sectional size of the channel. [27] Chip-based fluidic actuators using surface acoustic waves (SAW) have become popular among microfluidic practitioners who continue to explore new applications in acoustofluidic integration. [28,29] Planar devices employing lithium niobate in conjunction with deposited and patterned interdigital electrodes (IDTs) were first reported in the 1960s by White and Voltmer, [30] delivering Rayleigh SAW as a nanometer-order amplitude electromechanical wave propagating from the IDT. [28] One of the most attractive aspects of using SAW for microfluidic actuation and manipulation is their very efficient fluidstructural coupling: most of the energy in the substrate is adjacent the solid-fluid interface, within four to five wavelengths of SAW from the surface. When SAWs come into contact with a fluid in its wave path, energy is leaked from the SAW into the fluid to form sound propagating at the Rayleigh angle from the solid-fluid interface owing to the mismatch of sound velocities between the fluid and the SAW in the substrate. [28] Most importantly, through the combination of acoustic streaming and direct acoustic forces on objects in the fluid, the MHz-order Controlled nanoscale manipulation of fluids and colloids is made exceptionally difficult by the dominance of surface and viscous forces. Acoustic waves have recently been found to overcome similar problems in microfluidics, but their ability to do so at the nanoscale remains curiously unexplored. Here, it is shown that 20 MHz surface acoustic waves (SAW) can manipulate fluids, fluid droplets, and particles, and drive irregular and chaotic fluid flow within fully transparent, high-aspect ratio 50-250 nm tall nanoslits fabricated via a new direct, room temperature bonding method for lithiu...

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Bonding of glass nanofluidic chips at room temperature by a one-step surface activation using an O2/CF4 plasma treatment

Cited by 80 publications

References 15 publications

Extended Nanofluidic Immunochemical Reaction with Femtoliter Sample Volumes

Extended Nanofluidic Immunochemical Reaction with Femtoliter Sample Volumes

Lab-on-a-chip devices: How to close and plug the lab?

Acoustic Nanofluidics via Room‐Temperature Lithium Niobate Bonding: A Platform for Actuation and Manipulation of Nanoconfined Fluids and Particles

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