2021
DOI: 10.1007/s00339-021-04885-z
|View full text |Cite
|
Sign up to set email alerts
|

Boosted anchor quality factor of a thin-film aluminum nitride-on-silicon length extensional mode MEMS resonator using phononic crystal strip

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

0
5
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
5
1

Relationship

0
6

Authors

Journals

citations
Cited by 6 publications
(5 citation statements)
references
References 20 publications
0
5
0
Order By: Relevance
“…The results show that the quality factors of the proposed three 170 MHz resonators are 51503, 83349 and 83899, while the traditional resonator quality factor is only 29899. A 133 MHz TPoS MEMS resonator with a PnC-strip-anchor-tie-line was proposed by [46], and the cell number on the quality factor was evaluated. The results show that the quality factor of the resonator with the proposed PnC strip is 19,902.…”
Section: Anchor Lossmentioning
confidence: 99%
“…The results show that the quality factors of the proposed three 170 MHz resonators are 51503, 83349 and 83899, while the traditional resonator quality factor is only 29899. A 133 MHz TPoS MEMS resonator with a PnC-strip-anchor-tie-line was proposed by [46], and the cell number on the quality factor was evaluated. The results show that the quality factor of the resonator with the proposed PnC strip is 19,902.…”
Section: Anchor Lossmentioning
confidence: 99%
“…Despite all performance enhancements to the IC industry and micro-fabrication, quartz crystal oscillators and surface acoustic wave devices are commonly used in transmitters and receivers of wireless architectures [1][2][3][4][5]. These components are widely spread in microelectronic markets due to their excellent properties [6][7][8]. One of these properties is low impedance characteristics, which are strongly preferred in constructing low insertion loss filters and low phase noise oscillators [9].…”
Section: Introductionmentioning
confidence: 99%
“…Based on this, it is urgently necessary to use some effective methods to suppress the anchor loss of the resonators. Presently, researchers have proposed a number of methods to reduce the resonator’s anchor loss [ 6 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 ]. For example, the anchor point is placed [ 6 ] at a minor resonator node.…”
Section: Introductionmentioning
confidence: 99%
“…The resonator boundary displacement is almost zero; thus, optimizing the loss of the resonator is designed into the butterfly [ 9 ], the etching stress release hole [ 10 ] on the resonator or the resonator edge to reduce the acoustic energy dissipated through the support beam. Based on the Bragg reflection law, introducing the acoustic mirror [ 12 , 13 ] or the phonon crystal structure [ 14 , 15 , 16 , 17 , 18 , 19 , 20 ] can reflect the acoustic waves propagating from the resonator, thus effectively reducing the anchor loss. In recent years, the continuous development of phonon crystal correlation theory will provide a good idea for many scientists to use phonon crystal to reduce the anchor loss of resonators.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation