Boron-doped nanocrystalline silicon germanium thin films for uncooled infrared bolometer applications

Xu, Renliang; He, Jian; Sun, Yan; Jiang, Yadong

doi:10.1016/j.infrared.2013.01.005

Cited by 13 publications

(2 citation statements)

References 18 publications

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“…27 Meanwhile, SiGe/Si is a novel material used for infrared applications, and it is sought as an alternative material to VO x and amorphous Si due to its crystalline phase for low signal noise. 28,29 According to eq 2, TCR can be increased by adjusting the barrier energy, V, and also the position of E f . Therefore, to have a high TCR value in the SiGe/Si structure, a high Ge content is required, whereas the E f position is related to the SiGe layers being intrinsic or lowly doped.…”

Section: ■ Introductionmentioning

confidence: 99%

A SiGe/Si Nanostructure with Graphene Absorbent for Long Wavelength Infrared Detection

Wang,

Kong,

et al. 2023

ACS Appl. Nano Mater.

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As a representative of new semiconductor nanostructured materials, the Si0.7Ge0.3/Si multilayers have received extensive attention for electronic and photonic applications. We fabricated an uncooled detector consisting of a four-period intrinsic Si0.7Ge0.3/Si multilayer as an active part and two p-type doped electrodes (a PIP profile) for long wavelength infrared detection. The strain in the SiGe/Si multilayer was characterized globally by high-resolution X-ray diffraction (HRXRD) and locally by nanobeam diffraction (NBD) in a high-resolution transmission electron microscope. The performance of detectors was characterized by the temperature coefficient of resistance (TCR), voltage noise power spectral density, and dark current measurement. The detectors with graphene on the top electrode show an improvement for TCR from −2.65%/K to −3.94%/K. Based on our results, the SiGe/Si multilayer structure is an excellent thermal imaging material due to its excellent thermal response as well as its CMOS compatibility.

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Section: ■ Introductionmentioning

confidence: 99%

A SiGe/Si Nanostructure with Graphene Absorbent for Long Wavelength Infrared Detection

Wang,

Kong,

et al. 2023

ACS Appl. Nano Mater.

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“…Due to the high level of rarefaction, the simulation of gas flow in a micro-cavity that encloses an array of microbolometers 1–5 is much more challenging than in the classical flow regimes: the low number of gas molecules encapsulated in the considered domain make their mean free path much longer than usual, so the diffusive description used in the continuum approach (Navier-Stokes equations) ceases to be valid. The degree of rarefaction of a gas in such micro-systems is generally defined by the Knudsen parameterwhere λ is the mean free path of the molecule and L the characteristic dimension of the system.…”

Section: Introductionmentioning

confidence: 99%

Advanced numerical investigation of the heat flux in an array of microbolometers

Stocchi¹,

Mencarelli²,

Pierantoni³

et al. 2019

Sci Rep

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The investigation of the thermal properties of an array of microbolometers has been carried out by mean of two independent numerical analysis, respectively the Direct-Simulation Monte Carlo (DSMC) and the classic diffusive approach of the Fourier’s equation. In particular, the thermal dissipation of a hot membrane placed in a low-pressure cavity has been studied for different values of the temperature of the hot body and for different values of the pressure of the environment. The results for the heat flux derived from the two approaches have then been compared and discussed.

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Microwave Cooled Microbolometers Based on Cermet Si–Cr Films

Вдовичев

Vdovin

Klimov

et al. 2017

Radiophys Quantum El

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Boron-doped nanocrystalline silicon germanium thin films for uncooled infrared bolometer applications

Cited by 13 publications

References 18 publications

A SiGe/Si Nanostructure with Graphene Absorbent for Long Wavelength Infrared Detection

A SiGe/Si Nanostructure with Graphene Absorbent for Long Wavelength Infrared Detection

Advanced numerical investigation of the heat flux in an array of microbolometers

Microwave Cooled Microbolometers Based on Cermet Si–Cr Films

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