2021
DOI: 10.1007/s10854-021-06966-4
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Boron doped SiC thin film on Silicon synthesized from polycarbosilane: a new lead free material for applications in piezosensors

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“…A pressure sensor has simple structure, basically a mechanically displaceable part in response to an applied pressure. The displacement due to the applied pressure can easily be converted into a proportional electrical quantity (transduction) by sensors based on piezo electric effect, based on variation in resistance as in the case of piezo resistors, based on variation in capacitance of a capacitive sensor, change in resonant frequency of the resonant sensors or pressure being measured by change in optical properties as in the case optical pressure sensors [1][2][3][4]. Due to the number of advantages that pressure sensors have, like miniaturized size, higher sensitivity, tunable material properties, linearity, high resonant frequency, low hysteresis, fast recovery time etc, [5,6] the research in designing and producing smaller and more efficient sensor is considerably done and keep continuing.…”
Section: Introductionmentioning
confidence: 99%
“…A pressure sensor has simple structure, basically a mechanically displaceable part in response to an applied pressure. The displacement due to the applied pressure can easily be converted into a proportional electrical quantity (transduction) by sensors based on piezo electric effect, based on variation in resistance as in the case of piezo resistors, based on variation in capacitance of a capacitive sensor, change in resonant frequency of the resonant sensors or pressure being measured by change in optical properties as in the case optical pressure sensors [1][2][3][4]. Due to the number of advantages that pressure sensors have, like miniaturized size, higher sensitivity, tunable material properties, linearity, high resonant frequency, low hysteresis, fast recovery time etc, [5,6] the research in designing and producing smaller and more efficient sensor is considerably done and keep continuing.…”
Section: Introductionmentioning
confidence: 99%