1994
DOI: 10.1063/1.112992
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Boron doping of silicon using coalloying with aluminium

Abstract: We present a new technique for boron (B) doping of silicon. In this letter we show that a B doping profile of more than 2 μm thickness with a maximum active doping concentration of 3×1019 cm−3 can be formed by a fast (<1 min) alloying process at a temperature of 850 °C. Thick-film aluminum is used to obtain an alloying and epitaxial regrowth process in accordance with the Al–Si phase diagram. The atomic concentration profile of the B- and Al-doped Si layer was determined by secondary ion mass spectromet… Show more

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Cited by 36 publications
(12 citation statements)
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“…In a conventional solar cell, a thick Al film is deposited onto a wafer backside and then annealed to avoid the parasitic p-n junction. Nevertheless, the surface recombination velocity at the Al-Si alloy rear contact is relatively high because a doping concentration is not more than 3 × 10 18 cm -3 [9]. In our results, however, the surface concentration of boron SOD diffusion lies in the range of 7 to 8 x 10 20 cm -3 .…”
Section: Resultscontrasting
confidence: 67%
“…In a conventional solar cell, a thick Al film is deposited onto a wafer backside and then annealed to avoid the parasitic p-n junction. Nevertheless, the surface recombination velocity at the Al-Si alloy rear contact is relatively high because a doping concentration is not more than 3 × 10 18 cm -3 [9]. In our results, however, the surface concentration of boron SOD diffusion lies in the range of 7 to 8 x 10 20 cm -3 .…”
Section: Resultscontrasting
confidence: 67%
“…The resulting profiles for paste D are shown in Figure . Please note that actual BSF profiles show higher electrically active dopant concentrations in measured electrochemical capacitance voltage profiles, because modern pastes contain additional p‐type dopants such as boron . It is also conceivable that they could contain alloying agents that alter the maximum solid‐state solubility of Al in epitaxially grown Si in a ternary material system .…”
Section: Calculation Of Resulting Doping Profilementioning
confidence: 99%
“…Model of local Al-BSF formation for industrial PERC solar cells T. Lauermann et al pastes contain additional p-type dopants such as boron [23,24]. It is also conceivable that they could contain alloying agents that alter the maximum solid-state solubility of Al in epitaxially grown Si in a ternary material system [25].…”
Section: Calculation Of Resulting Doping Profilementioning
confidence: 99%
“…For example, rear side recombination in the Al-Si contact is high since the concentration of Al in the Al-Si alloy is less than 3 Â 10 18 cm À3 . 2 A high (600 cm s À1 ) back surface recombination velocity (BSRV) and poor back surface reectance of 60% results 1 when Al-BSF is used, which are not suitable properties for high efficiency solar cells. These electrical and optical properties deteriorate further when Si wafer thickness is reduced.…”
Section: Introductionmentioning
confidence: 99%