Boron nitride nanosheets as oxygen-atom corrosion protective coatings

Yi, Min; Shen, Zhigang; Zhao, Xiaohu; Liang, Shuaishuai; Лю, Лэй

doi:10.1063/1.4870530

Cited by 87 publications

(61 citation statements)

References 32 publications

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“…• C. 494 Given the atomic thick dimensions of graphene and boronitrene, these materials have great potential to meet the ITRS forecasted goal of a <1-2 nm DB. However as with SAMS and other materials, the performance of 2D materials will be greatly challenged by the presence of defects, topography, and material heterogeneities that exist on the surfaces of metal interconnect structures.…”

Section: 15mentioning

confidence: 99%

Dielectric Barrier, Etch Stop, and Metal Capping Materials for State of the Art and beyond Metal Interconnects

King

2014

ECS J. Solid State Sci. Technol.

133

115

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Over the past decade, the primary focus for improving the performance of nano-electronic metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) delays via utilizing insulating dielectrics with ever lower values of dielectric permittivity. The integration and implementation of such low dielectric constant (i.e. low-k) materials has been fraught with numerous challenges. For intermetal and interlayer (ILD) low-k dielectrics, these challenges have been largely associated to integration with metal interconnect fabrication processes and well documented and reviewed in the literature. Although equally important, less attention has been given to other low-k dielectrics utilized in metal interconnect structures that are commonly referred to as low-k dielectric barriers (DB), etch stops (ES), and/or Cu capping layers (CCL). These materials present numerous challenges as well for integration into metal interconnect fabrication processes. However, they also have more stringent integrated functionality requirements relative to low-k ILD materials that serve only a basic purpose of electrically isolating adjacent metal lines. In this article, we review the integration challenges and associated integrated functionality requirements for low-k DB/ES/CCL materials with a focus on the current status and future direction needed for these materials to facilitate both Moore's law (i.e. More Moore) and More than Moore scaling.

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Section: 15mentioning

confidence: 99%

Dielectric Barrier, Etch Stop, and Metal Capping Materials for State of the Art and beyond Metal Interconnects

King

2014

ECS J. Solid State Sci. Technol.

133

115

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“…[2] In contrast to the covalent C-C bond of graphene, the ionic nature of the B-N bond makes BNNS highly resistant to oxidation (stable up to 840 ºC in air) [3] and to corrosion. [4] Additionally, BNNS shows excellent mechanical properties and thus has been extensively applied as a lubricant in harsh environments. [5] More interestingly, BNNS has excellent thermal conductivity, which makes it an efficient filler to improve the thermal performance of liquids [6,7] and solid polymeric composites.…”

mentioning

confidence: 99%

Edge‐Hydroxylated Boron Nitride Nanosheets as an Effective Additive to Improve the Thermal Response of Hydrogels

et al. 2015

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“…Figure 1 summarizes the main applications of these innovative membranes considering the separation mechanisms. Graphene and other 2D materials may ideally act as an absolute barrier, preventing the diffusion of any gas species and molecule [31,32]. Several works outlined the enhanced oxygen-atom corrosion resistance of few-layer graphene and graphene oxide-based materials [33,34] and successfully demonstrated their potential use as protective coatings for anticorrosion applications.…”

Section: Graphene-based Membranesmentioning

confidence: 99%

Graphene-Based Membrane Technology: Reaching Out to the Oil and Gas Industry

Castro¹,

Cocuzza

Lamberti

et al. 2018

Geofluids

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This paper presents a critical review and the state of the art of graphene porous membranes, a brand-new technology and backdrop to discuss its potential application for efficient water desalination in low salinity water injection (LSWI). LSWI technology consists in injecting designed, adequately modified, filtered water to maximize oil production. To this end, desalination technologies already available can be further optimized, for example, via graphene membranes, to achieve greater efficiency in water-oil displacement. Theoretical and experimental applications of graphene porous membranes in water desalination have shown promising results over the last 5-6 years. Needless to say, improvements are still needed before graphene porous membranes become readily available. However, the present work simply sets out to demonstrate, at least in principle, the practical potential graphene membranes would have in hydrocarbon recovery processes.

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Boron nitride nanosheets as oxygen-atom corrosion protective coatings

Cited by 87 publications

References 32 publications

Dielectric Barrier, Etch Stop, and Metal Capping Materials for State of the Art and beyond Metal Interconnects

Dielectric Barrier, Etch Stop, and Metal Capping Materials for State of the Art and beyond Metal Interconnects

Edge‐Hydroxylated Boron Nitride Nanosheets as an Effective Additive to Improve the Thermal Response of Hydrogels

Graphene-Based Membrane Technology: Reaching Out to the Oil and Gas Industry

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