Soft Breakdown stress on CMOS RF devices has been examined. The total gate capacitance decreases with stress. The analytical equation of cut-off frequency including the gate oxide breakdown is derived. The effect of soft breakdown on the performance of an LC oscillator is examined .The oscillation frequency of the LC oscillator increases after soft breakdown stress. Index Terms-Soft breakdown, gate capacitance, analytical equation of cut-off frequency, LC oscillator, Oscillation frequency. 0-7803-7904-7/03/$17.00 02003 IEEE