Bright nickel film deposited by supercritical carbon dioxide emulsion using additive-free Watts bath

Chang, Tso-Fu Mark; Sone, Masato; Shibata, Akinobu; Ishiyama, Chiemi; Higo, Yakichi

doi:10.1016/j.electacta.2010.06.037

Cited by 73 publications

(55 citation statements)

References 24 publications

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“…This PdH x /Ti electrode was rinsed with DI water for 5 seconds and then was dipped into the testing electrolytes for being employed as the reference electrode under a three-electrode mode where graphite or copper plates of 10 Â 10 mm 2 is served as the working electrode and the platinum gauze is the counter electrode. The bath temperature of normal aqueous electrolytes was controlled at the specified values by a water thermostat (Haake) with an accuracy of 0.1 C. For the EP-SCE Watts nickel system, polyoxyethylenelauryl ether (C 12 H 25 (OCH 2 CH 2 ) 15 OH), a non-ionic surfactant, was added into the additive-free Watts bath at a volume fraction of 1.0 v% with respect to volume of the aqueous electrolyte for forming the emulsified phase [11]. Initially, 40 mL of aqueous Watts nickel bath containing 1.0 v% surfactant were charged into the cell.…”

Section: Methodsmentioning

confidence: 99%

“…Since temperature of the electrolytes containing sc-CO 2 is higher than 25 C [11], the rest potential stability of PdH x /Ti at elevated temperatures has to be checked. Fig.…”

Section: Pdh X /Ti As a Reference Electrodementioning

confidence: 99%

“…Meanwhile, hydrogen evolution is an inevitable side reaction of electroplating in aqueous electrolytes [9], which easily causes the formation of defects within/on the deposit films owing to the adhesion of hydrogen bubbles. In order to resolve these problems, some researches tried to electroplate metals, alloys, or oxides from aqueous electrolytes containing sc-CO 2 and proposed a new technique, called electroplating using sc-CO 2 emulsion (EP-SCE) [10,11]. This new electroplating technique provides several attractive advantages, such as low surface tension, adjustable mass transport properties, and most importantly, high solubility of hydrogen in sc-CO 2 , which promotes detachment of hydrogen bubbles from the cathode surface [1,12] and avoids the formation of deposit defects efficiently [10,11].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Preparation and characterization of palladium-hydride-coated titanium as a reference electrode for the supercritical carbon dioxide emulsion electrochemical system

Hsu

Chang

et al. 2015

Electrochimica Acta

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Section: Methodsmentioning

confidence: 99%

“…Since temperature of the electrolytes containing sc-CO 2 is higher than 25 C [11], the rest potential stability of PdH x /Ti at elevated temperatures has to be checked. Fig.…”

Section: Pdh X /Ti As a Reference Electrodementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Preparation and characterization of palladium-hydride-coated titanium as a reference electrode for the supercritical carbon dioxide emulsion electrochemical system

Hsu

Chang

et al. 2015

Electrochimica Acta

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“…5, the electroplating reaction is interrupted on speci c surface where the dispersed CO 2 micelles are in contact with the cathode, and the reaction eventually resumes when the micelles leave the surface. These features are named periodic plating characteristics (PPC) and suggested to give the grain re nement effect 16,17) . Grain size of the lm prepared by the ESCE varied with the reaction pressure as shown in Fig.…”

Section: Evaluations Of Mechanical Properties Of Nanocrystalline Nickmentioning

confidence: 99%

Evaluations of Mechanical Properties of Electrodeposited Nickel Film by Using Micro-Testing Method

2016

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Compression and tensile testing of electrodeposited nickel lms with micro-sized specimens were reviewed. Preparation of micro-specimens without the tapering was realized by the micro-specimen fabrication method developed in our group. Accurate micro-testing method with precisely-shaped specimens is needed to reveal micro-mechanical properties of electrodeposited metals. The micro-testing on nanocrystalline nickel plated by an electrodeposition method with supercritical carbon dioxide showed remarkably high strength, and the strength increased with a decrease in the specimen size. The results indicated grain boundary mediated deformation of the electrodeposited nanocrystalline nickel.

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“…We have proposed an electrodeposition method with supercritical carbon dioxide (scCO 2 ) emulsions [26][27][28], which was named ED-SCE, as shown in Fig. 1, to reduce the formation of defects in the electrodeposited materials.…”

Section: Electrodeposition In Supercritical Carbon Dioxide Emulsions mentioning

confidence: 99%

Nanoscale Cu Wiring by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte

Sone

2015

Electroplating of Nanostructures

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Novel electrodeposition (ED) techniques utilizing supercritical carbon dioxide (scCO 2 ) emulsions (SCE) are introduced. ScCO 2 has low surface tension and high compatibility with hydrogen. Thus, this method is applied in fine Cu wiring to allow the complete filling of Cu into nanoscale confined space. The electrochemical reactions are carried out in emulsions composed of an aqueous electrolyte, scCO 2 , and surfactants. Three aspects in fine Cu wiring will be introduced, which are the dissolution of the Cu seed layer in the SCE, the gap-filling capability of the ED-SCE, and the contamination in the plated Cu. At first, the dissolution of the Cu seed layer in the SCE was observed. In order to prevent the dissolution of the Cu seed layer, the addition of Cu particles into the SCE was found to be effective. The electrolyte containing the SCE and the Cu particles is named scCO 2 suspension (SCS). The gapfilling capability was evaluated using test element groups (TEGs) with patterns of vias with a diameter of 70 nm and an aspect ratio of 5. Many defects were observed in the vias filled using the conventional electrodeposition (CONV) method. On the other hand, defect-free fillings were obtained by the ED-SCS method. Because of the highpressure environment needed to form the scCO 2 , the reaction cells are usually batchtype high-pressure vessels. In order to improve the feasibility of the ED-SCS technique, a continuous-flow reaction system is also proposed and examined using a round-type large-area TEG with a diameter of 300 mm. Complete fillings were obtained for vias with a diameter of 60 nm and an aspect ratio of 5 on the large-area TEG. This result was in good agreement with that of the batch-type reaction system and demonstrated the successful application of the continuous-flow system with ED-SCS.

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Bright nickel film deposited by supercritical carbon dioxide emulsion using additive-free Watts bath

Cited by 73 publications

References 24 publications

Preparation and characterization of palladium-hydride-coated titanium as a reference electrode for the supercritical carbon dioxide emulsion electrochemical system

Preparation and characterization of palladium-hydride-coated titanium as a reference electrode for the supercritical carbon dioxide emulsion electrochemical system

Evaluations of Mechanical Properties of Electrodeposited Nickel Film by Using Micro-Testing Method

Nanoscale Cu Wiring by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte

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