Broadband and Polarization-Independent Efficient Vertical Optical Coupling With 45° Mirror for Optical I/O of Si Photonics

Noriki, Akihiro; Amano, Tsuyoshi; Shimura, Daisuke; Onawa, Yosuke; Sasaki, Hirokazu; Yamada, Koji; Nishi, Hidetaka; Tsuchizawa, Tai; Ukita, Shigenari; Sasaki, Mikiko; Mori, Masahiko

doi:10.1109/jlt.2015.2507181

Cited by 9 publications

(3 citation statements)

References 21 publications

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“…The mirrors were integrated into the SiON waveguide using the fabrication technology described in a previous work. 37) The microscopy image of the mirror surface and cross-sectional scanning electron microscopy (SEM) image are shown in Figs. 5(a) and 5(b), respectively.…”

Section: Methodsmentioning

confidence: 99%

“…In a previous work, the mirrors were demonstrated with additional losses of approximately 0.3 dB. 37) Therefore, a coupling angle error of over ±5°will cause a 66% degradation of the coupling efficiency. To avoid such a relatively large degradation, the coupling angle error should be sufficiently less than ±5°.…”

Section: Tolerance Evaluation Of Coupling Anglementioning

confidence: 99%

“…We integrated 45°m irrors into Si-rich silica optical waveguides on a Si substrate using a common dicing machine and polishing process, and successfully demonstrated efficient, broadband, and polarization-independent surface optical coupling. 37) Thus, the mirror-based surface optical coupling technology is very attractive owing to its structural simplicity, efficient characteristics, and high compatibility for wavelengthdivision multiplexing (WDM) and polarization diversity, which are important technologies for large bandwidth and long-haul optical communication.…”

Section: Introductionmentioning

confidence: 99%

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Mirror-based surface optical input/output technology with precise and arbitrary coupling angle for silicon photonic application

Noriki¹,

Amano²,

Mori³

et al. 2017

Jpn. J. Appl. Phys.

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Mirror-based surface optical coupling is an attractive technology for the optical input/output of Si photonics. For the practical use of the mirrorbased surface optical coupling, we evaluated its coupling angle controllability. Different angular mirrors were integrated into 3 ' 3-µm-square single-mode silicon oxynitride optical waveguides on Si substrates. Near-and far-field patterns of optical beams output from the mirrors were measured to evaluate the beam characteristics and coupling angles. We successfully controlled the coupling angle over a wide range of more than 20°without beam characteristic variation, and perfect vertical output, which is difficult to achieve using grating couplers, was successfully demonstrated. The coupling angle error was less than +1°, which was sufficiently small to ignore additional coupling loss. The wavelength dependence of the coupling angle was also evaluated and found to be less than +0.5°over wide wavelength ranges of 1.26-1.36 and 1.52-1.62 µm.

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Section: Methodsmentioning

confidence: 99%

Section: Tolerance Evaluation Of Coupling Anglementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Mirror-based surface optical input/output technology with precise and arbitrary coupling angle for silicon photonic application

Noriki¹,

Amano²,

Mori³

et al. 2017

Jpn. J. Appl. Phys.

Self Cite

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Surface coupling of plasma optical emission spectra with bent metal-clad waveguide

Ali

Hong

2019

Opt Quant Electron

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Hybrid material integration for active photonic applications

Chen,

Fang

et al. 2024

APL Photonics

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The huge development of micro-/nano-manufacturing techniques on different materials has greatly expanded the possibilities of realizing on-chip multifunctional devices on photonic integrated circuits. In recent years, we have witnessed technological advancements, such as active photonic applications through hybrid integration. In this Perspective, we first summarize the integrated photonic materials, hybrid integration technologies, and corresponding coupling techniques in hybrid integration and give the technique prospects. We also introduce significant advances in hybrid integration technologies for active photonic applications, such as laser sources, optical frequency combs, and modulators, and give our views that are likely to develop rapidly. Finally, we discuss the challenges in hybrid technologies and photonic applications.

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Broadband and Polarization-Independent Efficient Vertical Optical Coupling With 45° Mirror for Optical I/O of Si Photonics

Cited by 9 publications

References 21 publications

Mirror-based surface optical input/output technology with precise and arbitrary coupling angle for silicon photonic application

Mirror-based surface optical input/output technology with precise and arbitrary coupling angle for silicon photonic application

Surface coupling of plasma optical emission spectra with bent metal-clad waveguide

Hybrid material integration for active photonic applications

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