“…3D schematic view for MDM tri-layer with upper gold patterning : a=b=105nm, c=100nm, p=175nm, amorphous carbon, h 1 = 35nm, lower Au, h 2 = 300nm as shown in[11], on 1mm glassThe paper is organised as follows: The fabrication steps for the tri-layer are discussed in detail along with a FIB image of a cross-section showing resulting layer thicknesses. Then FIB etching of the upper 2D patterned layer is described.…”