All-pass phase shifters using ferroelectric varactors are designed, fabricated, and measured. The design equations for the allpass phase shifter are presented. The fabrication process of the ferroelectric varactors is described. Measurement results of singlestage all-pass phase shifters show that phase shift greater than 85゚ can be achieved under 10-V bias. At the frequency where maximum phase shift occurs, the insertion loss is less than 2 dB and the return loss is greater than 12 dB. Simulations based on the measured S parameters of the single-stage phase shifters show that, by cascading four stages of individually biased single-stage phase shifters, maximum phase shift of 180゚ can be achieved with a phase error as low as ±3゚ between 2.1 GHz and 3.25 GHz, corresponding to a 43% bandwidth.