2001
DOI: 10.1117/12.436794
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Bulge testing of single- and dual-layer thin films

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Cited by 3 publications
(4 citation statements)
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“…This is the bulge test [13,36,37]. Membranes with square, rectangular, and circular geometries have been measured and materials such as crystalline, polycrystalline and porous silicon, gold and silver, carbon-like diamond, silicon nitride, silicon oxide, and even polymers, deposited by different techniques in single or multilayer configurations, have been previously characterized [13,[36][37][38][39][40][41][42][43][44][45].…”
Section: Mechanical Materials Characterization-bulge Testingmentioning
confidence: 99%
“…This is the bulge test [13,36,37]. Membranes with square, rectangular, and circular geometries have been measured and materials such as crystalline, polycrystalline and porous silicon, gold and silver, carbon-like diamond, silicon nitride, silicon oxide, and even polymers, deposited by different techniques in single or multilayer configurations, have been previously characterized [13,[36][37][38][39][40][41][42][43][44][45].…”
Section: Mechanical Materials Characterization-bulge Testingmentioning
confidence: 99%
“…Residual stress can be introduced in thin films including polymer thin films through volume changes, which may take place in association with crosslinking or crystallization mainly due to: 1. Interferometers: (Huang, Lou, Tsai, Wu, & Lin, 2007;Huston, Sauter, Bunt, & Esser, 2001;Maier-Schneider, Maibach, & Obermeier, 1995;Tsakalakos, 1981;Wu, Fang, & Yip, 2004;Xiang & Chen, 2005;Zheng et al, 2000) 2. Atomic force Microscope (AFM): (Schweitzer & Göken, 2007) 3.…”
Section: Characterizing a Thin Polymer Sheetmentioning
confidence: 99%
“…Bulge test has been successfully used to characterize thin films of a variety of materials (metals, ceramics, semiconductors and polymers) and bulge geometries, summarized in Table 1. (Kalkman et al, 1999;Maier-Schneider et al, 1995;Schweitzer & Göken, 2007;Vlassak & Nix, 1992;Youssef, Ferrand, Calmon, Pons, & Plana, 2010) Square, Rectangular Silicon Carbide (SiC) (Huston et al, 2001;Wu et al, 2004) Square, Rectangular, Circular Silicon (Si) (Huston et al, 2001;Youssef et al, 2010) Square, Rectangular…”
Section: Bulge Testmentioning
confidence: 99%
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