1998
DOI: 10.1109/5.704259
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Bulk micromachining of silicon

Abstract: Bulk silicon etching techniques, used to selectively remove silicon from substrates, have been broadly applied in the fabrication of micromachined sensors, actuators, and structures. Despite the more recent emergence of higher resolution, surfacemicromachining approaches, the majority of currently shipping silicon sensors are made using bulk etching. Particularly in light of newly introduced dry etching methods compatible with complementary metal-oxide-semiconductors, it is unlikely that bulk micromachining wi… Show more

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Cited by 659 publications
(396 citation statements)
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“…Under etching is not always harmful, by using nitrite as structure layer or by selectively doping of boron in desired region, it is possible to release free standing cantilever or bridge above silicon cavity [7,40,56]. Moreover, if multi photolithography steps are used, a rib reinforced micro beams is also achievable [41], the increase of the bending stiffness by the adoption of such structure is manifest.…”
Section: Figure 44 Comparison Of Normal (Left) and Irregular Undercumentioning
confidence: 99%
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“…Under etching is not always harmful, by using nitrite as structure layer or by selectively doping of boron in desired region, it is possible to release free standing cantilever or bridge above silicon cavity [7,40,56]. Moreover, if multi photolithography steps are used, a rib reinforced micro beams is also achievable [41], the increase of the bending stiffness by the adoption of such structure is manifest.…”
Section: Figure 44 Comparison Of Normal (Left) and Irregular Undercumentioning
confidence: 99%
“…Wet etching of silicon wafer in alkaline aqueous has been extensively studied [7,21,[40][41][42][43], in following sections, we would like to make a brief introduction of the etch behaviors of different wafers. Possible structures that can be fabricated are presented, all these results are derived from the apparent simple relations showed in Tab.…”
Section: Wet Etching Of (100) Silicon Wafermentioning
confidence: 99%
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