2008
DOI: 10.1016/j.jcrysgro.2008.06.071
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Burgers vector analysis by three-dimensional laser-scattering tomography

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Cited by 2 publications
(3 citation statements)
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“…In general, spatial distributions of dislocations in AlN crystals with densities below 10 6 cm −2 can be studied by defect-selective etching (DSE), 5,14,15 laser scattering tomography (LST), 16 and X-ray diffraction imaging techniques such as X-ray topography (XRT). 17−19 DSE only provides the distribution of intersection points in the form of pits caused by chemical etching along the dislocation lines.…”
Section: ■ Introductionmentioning
confidence: 99%
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“…In general, spatial distributions of dislocations in AlN crystals with densities below 10 6 cm −2 can be studied by defect-selective etching (DSE), 5,14,15 laser scattering tomography (LST), 16 and X-ray diffraction imaging techniques such as X-ray topography (XRT). 17−19 DSE only provides the distribution of intersection points in the form of pits caused by chemical etching along the dislocation lines.…”
Section: ■ Introductionmentioning
confidence: 99%
“…In general, spatial distributions of dislocations in AlN crystals with densities below 10 6 cm –2 can be studied by defect-selective etching (DSE), ,, laser scattering tomography (LST), and X-ray diffraction imaging techniques such as X-ray topography (XRT). …”
Section: Introductionmentioning
confidence: 99%
“…Several methods can be used in the investigation of crystal defects, such as transmission electron microscopy (TEM) [1,2], X-ray topography (XRT) [3][4][5], optical and cathode luminescence microscopy, photoluminescence spectroscopy [6,7], laser-scattering tomography [8], selective etching [9], etc. XRT is generally used since it is efficient and nondestructive to the specimen.…”
Section: Introductionmentioning
confidence: 99%