The dislocation evolution in a cross-section a-plane
cut through
a sublimation-grown aluminum nitride (AlN) crystal grown with low-temperature
gradients and subsequent low thermal stress is investigated with different
X-ray diffraction imaging methods. Exploiting the so-called weak-beam
contrast using monochromatic X-rays in combination with suitable three-dimensional
(3D) interpretation and reconstruction allows the identification of
individual dislocations as well as tracing their progression in the
crystal volume, even in the considerably strained interface region.
It is particularly striking that the laterally grown crystal volume
is dislocation-free. The dislocation densities in the seed and the
bulk volume are similar (1 × 103 cm–2), but while the dislocations in the seed are randomly arranged,
the dislocations in the bulk volume show a uniform line shape, indicating
a common mechanism of dislocation movement. Since the dislocation
slings in the bulk do not lie in slip planes, it can be concluded
that the lateral movement does not result from dislocation glide,
but from impurity-driven climb of dislocations during growth. The
absence of slip can be explained by the low-temperature gradients
and the subsequent low thermal stress below the critical resolved
shear stress (CRSS).