Buried piezoresistive sensors by means of MeV ion implantation

Nishimoto, T.; Shoji, Shuichi; Esashi, Masayoshi

doi:10.1016/0924-4247(93)00673-r

Cited by 11 publications

(4 citation statements)

References 5 publications

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“…In general, the deflection is caused by its interaction with measurands under circumstances of stress, a small force, and a change of mass or temperature. Micromachined silicon cantilever beams have been applied in liquid fluid flow volume sensing [5,6]. In this paper, we present an ultra-thin highly sensitive piezoresistive cantilever beam for measuring the airflow velocity profile in a small steel pipe based on the normal pressure drag principle.…”

Section: Introductionmentioning

confidence: 99%

Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing

Evans

Brunnschweiler

et al. 2002

J. Micromech. Microeng.

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We present a highly sensitive ultra-thin micromachined silicon cantilever beam with an integrated strain gauge on its root for optimizing piezoresistive readout. The mechanical characteristics and electrical readout of the cantilever beam, such as spring constant, resonant frequencies and piezoresistive sensitivity, are theoretically given from the derived formulae or from finite element modeling. The results of characterization show reasonably good agreement between the experimental results and the theoretical values. As one of the applications, for the first time the fabricated silicon cantilever beams have been applied to measure airflow velocity distribution in a steel pipe with an inner diameter of 7.0 mm. The experimental piezoresistive sensitivity ( R/R)/y(0) is in the range of 0.23-2.89 × 10 −6 nm −1 in the beam bending tests, and the experimental flow sensitivity ( R/R)/V gas 2 is in the range of 0.652-4.489 × 10 −5 (m s −1 ) −2 in the airflow velocity tests. The experimental detectable minimum airflow velocity is 7.0 cm s −1 , which is comparable to that of a hot wire anemometer.

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Section: Introductionmentioning

confidence: 99%

Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing

Evans

Brunnschweiler

et al. 2002

J. Micromech. Microeng.

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“…Furthermore, PZR is also known to suffer from long-term drift, especially when humidity of the surrounding environment is uncontrolled [14]. To cope with moisture, either a buried structure can be used, as shown in [15], either a passivation layer is deposited on top of the structure to act as a barrier [16], as it is the case for the device under discussion.…”

Section: Introductionmentioning

confidence: 99%

On the use of Kalman filters for high-order mode rejection in PZT-based microscanners

Frigerio

Cozzi²,

Molinari³

et al. 2023

J. Micromech. Microeng.

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This work discusses and compares two strategies for closed-loop control of quasi-static silicon mirrors for raster-scanning applications, actuated by thin films of lead-zirconate-titanate (PZT) and with embedded piezoresistive (PZR) angular displacement sensors. A first feedback control approach, based on piezoresistive readout of the device angular displacement through an integrated sensor, shows limitations related to high-order resonant modes of the mechanical structure. To overcome this issue, a feedback control scheme based on the use of a Kalman filter to estimate the angular displacement and velocity of the scanner is presented, achieving a maximum positioning error of 0.14° (1.75% of a 8° full-scale angular displacement), and a mean error within ±0.03° (0.74% peak-to-peak) over 80% of the scanned trace.

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“…To this end, sensing principle using the flow behavior around the sensor is necessary. Previous works use the shear force and drag force to measure flow velocity [2,3]. For the first time, we present a flow sensor utilizing the flow-induced vibration occurred when an elastic bluff body is exposed to a free stream.…”

Section: Introductionmentioning

confidence: 99%

Self-Oscillating Microcantilever Piezoresistive Flow Sensor

Shin

2006

KEM

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This article presents a new approach to measure the fluid velocity using the flow-induced vibration of a microcantilever. The gas flow sensor was fabricated using the microfabrication technology and mounted on a printed circuit board for experimental evaluation. For signal processing, a Wheastone bridge circuit was prepared. The experimental measurement of the fluid velocity was performed in the wind tunnel. The flow-induced vibration of the microcantilever was firstly visualized. Based on the power spectrum analysis, the vibrating frequency was constant at 1.173 kHz, independently of the inlet velocity. It is completely different from the conventional flow-induced vibration proportional to the inlet velocity. The peak-to-peak voltage outputs corresponding to the air velocities of 3, 4, 5 and 6 m/s were measured.

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Buried piezoresistive sensors by means of MeV ion implantation

Cited by 11 publications

References 5 publications

Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing

Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing

On the use of Kalman filters for high-order mode rejection in PZT-based microscanners

Self-Oscillating Microcantilever Piezoresistive Flow Sensor

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