The facile self‐assembly of monolayers films derived from N‐(2‐aminoethyl)‐2, 2, 4‐trimethyl‐1‐aza‐2‐silacyclopentane on silicon/silicon dioxide substrates from the solution phase is reported. This adsorbate reacts with silanols at the surface to produce a covalent siloxane linkage to the substrate via ring‐opening and produces no byproduct(s). The resulting diamine surface reacts with maleic anhydride or succinic anhydride to produce the corresponding carboxylic‐acid terminated surfaces. The kinetics of these reactions and their products were characterized by contact‐angle goniometry, optical ellipsometry, and X‐ray photoelectron spectroscopy.