C2.2 - Development of a conductive MEMS-SPM for nanoelectrical characterisation of nanostructured materials

Abstract

A conductive MEMS based scanning probe microscope (MEMS-SPM) has been developed to measure the mechanical and electrical properties of nanostructured materials including nanopillars and nanowires for energy harvesting devices. The MEMS-SPM features an integrated AFM cantilever gripper, with which various conductive AFM probes can be used as tactile stylus for nano-dimensional, nanomechanical and -electrical measurements. First measurement results will be presented.