“…Cobalt(II,III) oxide, Co 3 O 4 , is a magnetic p-type semiconductor most often used as a heterogeneous catalyst, in Li-ion batteries or as a solid-state sensor [80,[87][88][89]. CVD has been used to improve the sensor performance by homogenous doping with fluorine, with F-doped Co 3 O 4 successfully grown at temperatures between 200 and 400˝C by plasma enhanced-chemical vapour deposition using single-source precursors, Co(dbm) 2 (where dbm = 1,3-Diphenyl-1,3-propanedione) and Co(hfa) 2 TMEDA (where hfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate and TMEDA = N,N,N',N'-tetramethylethylenediamine) respectively [90].…”