The etching of wafers of cadmium telluride in aqueous and nonaqueous solutions before the epitaxial process of building structures CdxHg1-xTe and its influence on the surface quality of epitaxial layers. As the etchants investigated 2—20 % solution of bromine in isobutyl alcohol, 5 % solution of bromine in methanol, dimethylsulfoxide, ethylene glycol, solutions of bromine in hydrobromic acid and mixed with glycerin, a saturated solution of potassium dichromate in sulfuric acid. The speed of etching was varied from 0.2 to 9 µm/min. Polishing Set nature of the etching substrate of cadmium telluride in 5 % solution of bromine in i-butanol, the dissolution process is diffusion in nature and is limited by the mass transfer of the reactants in the temperature range of 10—60 °C, depending on the concentration of bromine and the viscosity of the solution. Studied the morphology and surface finish of epitaxial layers of CdxHg1-xTe, depending on the method of etching the original substrate. Found the optimal compositions of etchants for precipitaciones processing of obtaining structures with a height of asperities of the surface at 0.1 atm.