2014
DOI: 10.4028/www.scientific.net/amr.880.7
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Calculation of Energy Release Function of Ion Beam in Solids

Abstract: The mathematical formulation of space-time energy release function of accelerated ions in solids is presented. High-power pulsed ion beam and continuous focused ion beam interaction with metals are considered. The power density of deposited energy and specific energy input in a target have been calculated. A beam energy fraction expended on the collisional sputtering of target atoms has been estimated.

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Cited by 2 publications
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“…On the contrary, samples are heated during ion beam thinning, and their exact thermal history is difficult to assess. The ion flux density is linked to the beam current, diameter, and acceleration voltage [30], and at a given acceleration voltage, gallium-ion influence is greater than argon-ion influence [31], owing to atom size and penetration depth. Moreover, Ga+ FIBs were used on average at higher acceleration voltages and currents than Ar+ PIPS for these preparation techniques.…”
Section: Discussionmentioning
confidence: 99%
“…On the contrary, samples are heated during ion beam thinning, and their exact thermal history is difficult to assess. The ion flux density is linked to the beam current, diameter, and acceleration voltage [30], and at a given acceleration voltage, gallium-ion influence is greater than argon-ion influence [31], owing to atom size and penetration depth. Moreover, Ga+ FIBs were used on average at higher acceleration voltages and currents than Ar+ PIPS for these preparation techniques.…”
Section: Discussionmentioning
confidence: 99%