The high-frequency magnetic properties of low-temperature deposited Co-Sm films with amorphous-like structures were investigated for application to RF micromagnetic devices; the magnetic films in such devices require superior soft magnetic properties with high ferromagnetic resonance (FMR) frequency and tolerable thermal stability for the device fabrication processes. We observed that the anisotropy magnetic field, Hk, of a Co-Sm amorphous film increases with the Sm content; the Hk was greater than 5000 Oe for an Sm content greater than 15 at.%. The relationship between frequency and permeability yielded a high value for FMR frequency due to the large Hk. The FMR frequency could be controlled by changing the Sm content and was calculated to be greater than 20 GHz by using the measured saturation magnetization, Ms, and Hk. The Hk of as-deposited Co-Sm films decreased to a value half that of film annealed at 350°C. However, the extent of thermal degradation was relatively small, thereby exhibiting a distinct uniaxial magnetic anisotropy with a sufficiently high Hk even after a post-thermal process; this made the Co-Sm films suitable for applications in the GHz band.