1983
DOI: 10.1002/pssa.2210770116
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Calculation of Neutron-Induced Defect Clusters in Silicon and Comparison with TEM Investigations

Abstract: Neutron induced defect clusters in silicon are considered. The calculation is based on a model analogous to the radiation damages by Si+‐ion implantation in Si. The results are compared with high resolution TEM‐investigations. The experimental studies in principle confirm these calculations.

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Cited by 7 publications
(3 citation statements)
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“…13 These subcascades then cool down rapidly to form amorphous pockets in the lattice. The existence of these inclusions has been confirmed experimentally [14][15][16][17][18][19][20][21][22] and their formation kinetics has been described by MD simulations. 13,23,24 Fully amorphous Si has been studied computationally to a great extent, [25][26][27][28][29][30] and much research has been done on isolated point defects in Si, 31 but amorphous clusters of defects surrounded by a crystalline lattice constitute a novel case that has not been studied with ab initio methods previously.…”
Section: Methodsmentioning
confidence: 59%
“…13 These subcascades then cool down rapidly to form amorphous pockets in the lattice. The existence of these inclusions has been confirmed experimentally [14][15][16][17][18][19][20][21][22] and their formation kinetics has been described by MD simulations. 13,23,24 Fully amorphous Si has been studied computationally to a great extent, [25][26][27][28][29][30] and much research has been done on isolated point defects in Si, 31 but amorphous clusters of defects surrounded by a crystalline lattice constitute a novel case that has not been studied with ab initio methods previously.…”
Section: Methodsmentioning
confidence: 59%
“…The defect clusters are enriched by divacancies (~ 10 20 cm -3 ) and their structure is still crystalline silicon [14], as IR absorption and properties of divacancies annealing are not changed. High resolution TEM-investigations [15] is shown that agglomeration of interstitial atoms was not observed and the optical diffractogram taken from the defected area clearly shows the amorphous structure. In our opinion, it is possible a diffusion of interstitial atoms to the surface of silicon because of the small thickness of the region investigated (~10 nm) is a reason of amorphous regions forming.…”
Section: Theorymentioning
confidence: 95%
“…The defect clusters are enriched by divacancies (~10 20 cm -3 ) and their structure is still crystalline silicon [15], as IR absorption and properties of divacancy annealing are not changed. High-resolution TEM investigations [16] have shown that an agglomeration of interstitial atoms was not observed and the optical diffractogram taken from the defected area clearly shows the amorphous structure. It is possible a diffusion of interstitial atoms to the surface of silicon because of the small thickness of the region investigated (~10 nm) is the reason for amorphous regions forming.…”
Section: Theorymentioning
confidence: 96%