2024
DOI: 10.1088/1361-6463/ad7a81
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Calculation of thermodynamic properties and transport coefficients of Ar / N 2

Zhu Cheng,
Chen Xianhui,
Zhang Yunfei
et al.

Abstract: The composition, thermodynamic properties and transport coefficients of Ar-H2-Si and N2-H2-Si plasma within a temperature range of 300-30,000 K and pressure range of 0.1-10 atm are calculated under the assumptions of local thermal equilibrium (LTE) and local chemical equilibrium (LCE). Taking Debye-Hückel corrections into account, the chemical equilibrium composition and thermodynamic properties of these two plasma systems are derived using the mass action law and classical statistical thermodynamics respectivel… Show more

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