Calibrating nonlinearity coefficients of a nano-g accelerometer by dual-frequency excitation on a shaker

Li, Zhi; Zhang, Shaolin; Zhou, Yang; Wu, Wenjie; Tu, Liangcheng; Liu, Jinquan

doi:10.1016/j.measurement.2023.114016

Cited by 5 publications

(1 citation statement)

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“…This kind of error can have a significant impact, particularly when the DC output of the accelerometer is used to determine displacement by double integration over time. For example, DC errors could lead to an intolerant cumulative error on displacement over extended periods for inertial navigation [ 8 ]. Taking the inclination measurement [ 9 ] based on measuring gravitational acceleration as another example, any DC shifting of the accelerometer output can be incorrectly interpreted as changes in inclination, which would cause over-compensation in platform stabilization or drill mast alignment [ 2 ].…”

Section: Introductionmentioning

confidence: 99%

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers

Zhang,

Li,

Wang

et al. 2023

Micromachines

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The presence of strong ambient vibrations could have a negative impact on applications such as high precision inertial navigation and tilt measurement due to the vibration rectification error (VRE) of the accelerometer. In this paper, we investigate the origins of the VRE using a self-developed MEMS accelerometer equipped with an area-variation-based capacitive displacement transducer. Our findings indicate that the second-order nonlinearity coefficient is dependent on the frequency but the VRE remains constant when the displacement amplitude of the excitation is maintained at a constant level. This frequency dependence of nonlinearity is a result of several factors coupling with each other during signal conversion from acceleration to electrical output signal. These factors include the amplification of the proof mass’s amplitude as the excitation frequency approaches resonance, the nonlinearity in capacitance-displacement conversion at larger displacements caused by the fringing effect, and the offset of the mechanical suspension’s equilibrium point from the null position of the differential capacitance electrodes. Through displacement transducer and damping optimization, the second-order nonlinearity coefficient is greatly reduced from mg/g2 to μg/g2.

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Section: Introductionmentioning

confidence: 99%