Calibration and Uncertainty of CMM based on Estimation of Geometric Errors.

Umetsu, Kenta; Furutani, Ryoshu

doi:10.2493/jjspe.69.64

Cited by 5 publications

(6 citation statements)

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“…Numerical compensation techniques have been adopted for the geometric calibration of coordinate measuring machines (CMMs) [1][2][3]. Calibration is necessary because of, for example, mechanical imperfections in guide ways, which cause kinematical errors (parametric errors) in the motion of a slider, and these errors are enlarged by the Abbe offset with the result that the position of the stylus tip of the probe is spatially shifted from the nominal position.…”

Section: Introductionmentioning

confidence: 99%

Geometric calibration of a coordinate measuring machine using a laser tracking system

Umetsu

Furutnani

Osawa

et al. 2005

Meas. Sci. Technol.

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This paper proposes a calibration method for a coordinate measuring machine (CMM) using a laser tracking system. The laser tracking system can measure three-dimensional coordinates based on the principle of trilateration with high accuracy and is easy to set up. The accuracy of length measurement of a single laser tracking interferometer (laser tracker) is about 0.3 µm over a length of 600 mm. In this study, we first measured 3D coordinates using the laser tracking system. Secondly, 21 geometric errors, namely, parametric errors of the CMM, were estimated by the comparison of the coordinates obtained by the laser tracking system and those obtained by the CMM. As a result, the estimated parametric errors agreed with those estimated by a ball plate measurement, which demonstrates the validity of the proposed calibration system.

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Section: Introductionmentioning

confidence: 99%

Geometric calibration of a coordinate measuring machine using a laser tracking system

Umetsu

Furutnani

Osawa

et al. 2005

Meas. Sci. Technol.

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“…How to compensate the volumetric error is done. From (10) to (14), Measured errors at the space point P t ( , , ) x y z is expressed as: Where: θ 1 =θ x (x)+θ x (y)+θ x (z); θ 2 =θ y (x)+θ y (y)+θ y (z); θ 3 =θ z (x)+θ z (y)+θ z (z); δ 1 =δ x (x)+δ x (y)+δ x (z)-yφ yx -zφ zx ; δ 2 =δ y (x)+δ y (y)+δ y (z)-zφ yz ; δ 3 =δ z (x)+δ z (y)+δ z (z). If the volumetric errors in the work space are measured, the measurement error can be obtained from (15) and the measuring data can be so compensated to close the real value.…”

Section: ⅳ the Measurement Error Model In Cmm Work Spacementioning

confidence: 98%

“…At present, the volumetric error of CMM is denoted by 21 volumetric errors. The traditional method for calibrating 21 volumetric errors is to measure standard parts such as measuring block, ball-bar [8] , hole-ball plate [9][10] , four-ball detecting instrument and GUM Block [11] , then set up CMM's error model of its measuring space according to the measuring results. These methods for calibrating CMM have some disadvantages as follows: (1) The measured data is not incomplete.…”

Section: ⅰ Introductionmentioning

confidence: 99%

Research on a Novel Method for Measuring Volumetric Error of Coordinate Measuring Machine

Shi

Guo

Zhang

2010

2010 International Conference on Measuring Technology and Mechatronics Automation

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CMM (Coordinate Measuring Machine) is used as an accurate measuring instrument in manufacturing and design of products. High accurate CMM is required by the development of super-finish, micro-machinery, microelectronic mechanical systems (MEMS). The precision of CMM is influenced by its volumetric error and dynamic error. The volumetric error is the major component during slowly probing, but the dynamic error is not omitted during fast probing. Compensating the volumetric error is an effective approach to improve the precision of CMM. The volumetric error in the working space of CMM must be measured and the error model must be set up before compensating. In this paper, a novel method to measure 5 volumetric errors of a guide way at the same time by 3-beam laser interferometer is proposed. The error compensating model is validated by experiment. The method can also be used to measure the dynamical error of CMM and CNC machine in real-time. The research can be referred to design the super higher accurate CMM and the accurate CNC machine.

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“…Especially for those with long-duration measurements, the reading drift caused by temperature or airflow cannot be neglected. 6 Another method is to calibrate the errors with standard parts, such as a ballbar, 7 hole-ball plate, 8,9 double ring string (DRS), 10 and other non-standardized shapes. 11,12 In these applications, the performance of the calibration relies heavily on the fabrication accuracy or the declared dimension of the standard parts themselves.…”

Section: Introductionmentioning

confidence: 99%

An innovative method for coordinate measuring machine one-dimensional self-calibration with simplified experimental process

Fang

Butler

2013

Review of Scientific Instruments

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In this paper, an innovative method for CMM (Coordinate Measuring Machine) self-calibration is proposed. In contrast to conventional CMM calibration that relies heavily on a high precision reference standard such as a laser interferometer, the proposed calibration method is based on a low-cost artefact which is fabricated with commercially available precision ball bearings. By optimizing the mathematical model and rearranging the data sampling positions, the experimental process and data analysis can be simplified. In mathematical expression, the samples can be minimized by eliminating the redundant equations among those configured by the experimental data array. The section lengths of the artefact are measured at arranged positions, with which an equation set can be configured to determine the measurement errors at the corresponding positions. With the proposed method, the equation set is short of one equation, which can be supplemented by either measuring the total length of the artefact with a higher-precision CMM or calibrating the single point error at the extreme position with a laser interferometer. In this paper, the latter is selected. With spline interpolation, the error compensation curve can be determined. To verify the proposed method, a simple calibration system was set up on a commercial CMM. Experimental results showed that with the error compensation curve uncertainty of the measurement can be reduced to 50%.

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Calibration and Uncertainty of CMM based on Estimation of Geometric Errors.

Cited by 5 publications

References 0 publications

Geometric calibration of a coordinate measuring machine using a laser tracking system

Geometric calibration of a coordinate measuring machine using a laser tracking system

Research on a Novel Method for Measuring Volumetric Error of Coordinate Measuring Machine

An innovative method for coordinate measuring machine one-dimensional self-calibration with simplified experimental process

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