Calibration for phase retardation of photoelastic modulator based on compound Bessel function

Xing, Bozheng; Ding, M. D.; Lu, Jixi; Sun, Chang; Zhang, Ning; Fang, Xiujie; Zhao, Jiheng; Yang, Ke; Ma, Danyue; Han, Bangcheng

doi:10.1016/j.ijleo.2020.164322

Cited by 7 publications

(3 citation statements)

References 21 publications

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“…Apparently 𝑓 (𝑥) is a nonlinear function, fitting process is gradually adjusted 𝑆 Max (𝑥) of the variable parameter, make 𝑓 (𝑥) to a minimum, the available type (8) in the fitting of value of the variable parameter. The model solving process diagram as shown in figure 2.…”

Section: Optimization Methodsmentioning

confidence: 99%

“…S ' out For S' out =0.25×(S 0 +S 1 ×cos(2P)+S 2 ×sin(2P))×(1+cos(2A-2M)×cos(2P-2M)+cos δ×sin(2A-2M)×sin(2P-2M)) (8) Where: P,M,A are the relative coordinate rotation angles of the polarizer, PEM and the polarizer respectively; δ is the phase delay of PEM. Type (8) in the parameter S 0 and S 1 , P, M, A and the delta to stay fit, including 𝛿 = 𝛿 0 sin (t + 𝜔 p 0 ) + p 1 , namely to 𝜔, p 0 and set 𝛿 for p 1 assignment. Measured as a set of light intensity value S ' out Firstly, S 0 , S 1 and S 2 are set as auto variables, and the other parameters are set as fixed values.…”

Section: Model Of the Ellipsometry Systemmentioning

confidence: 99%

“…Thin film technology continues to develop in the application of semiconductors and optical devices, and accurate and rapid acquisition of film thickness d has become an important direction of thin film research 1,8 .Thin film thickness d is an important parameter, which determines the optical and electrical properties of thin films. The measurement methods of film thickness are generally divided into non-optical methods and optical methods.…”

Section: Introductionmentioning

confidence: 99%

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Phase delay calibration of optimization method in phase modulated ellipsometry

Wei

luo

et al. 2022

Thirteenth International Conference on Information Optics and Photonics (CIOP 2022)

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In order to achieve high sensitivity, accuracy and fast measurement of ellipsometry system, a phase modulation ellipsometry system based on Photoelastic Modulator (PEM) is adopted. At present, the phase delay of the Photoelastic Modulator is generally obtained by using the digital Lock-in Amplifier to extract the harmonic component and the DC component. The high frequency signal is discarded and the static phase delay of the Photoelastic Modulator is set as constant in the calculation process using the digital Lock-in Amplifier. However, the fluctuation of system parameters such as temperature, incident Angle and input signal will cause the decrease of measurement accuracy. In order to avoid the measurement error caused by traditional methods, an optimization method is proposed to calibrate the ellipsometry system with phase modulation. The nonlinear least square method is used to transform the ellipsometry measurement system into an optimization model, and the best match between the estimated value and the observed value is found. In order to verify the proposed optimization calibration method, the digital Lock-in Amplifier and the optimization method were used to scale the measurement system respectively, and the phase delay under the two methods were obtained respectively. The calculated deviations of the calibration of the two methods were 0.1805 and 0.141rad respectively, and the fluctuation of 1h calibration results was less than 1%. The results show that this method can reduce the influence of system parameter error on the measurement accuracy.

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Section: Optimization Methodsmentioning

confidence: 99%

Section: Model Of the Ellipsometry Systemmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Phase delay calibration of optimization method in phase modulated ellipsometry

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luo

et al. 2022

Thirteenth International Conference on Information Optics and Photonics (CIOP 2022)

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Nonlinear Effect Analysis and Sensitivity Improvement in Spin Exchange Relaxation Free Atomic Magnetometers

Xing,

Ma,

et al. 2024

Adv Quantum Tech

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In this study, the influence of the nonlinear magneto–optical rotation effect on a spin‐exchange relaxation‐free (SERF) atomic magnetometer is analyzed. The nonlinear effect is described by saturation parameters obtained from the density matrix model considering the Rabi oscillation of the probe light. For better sensitivity, the nonlinear effect is suppressed, and larger output signals are achieved. Based on the nonlinear effect analysis, the relationship between the probe sensitivity and light power density is obtained, and the optimal probe light power density is measured with best probe sensitivity. The best probe sensitivity improves by ≈6 times at the optimal probe light power density compared with that in the conventional linear optical rotation detection. The proposed method can be applied to SERF magnetometers, co‐magnetometers, and atomic spin gyroscopes.

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Ultrahigh Sensitivity Optical Rotation Detection Based on Reflecting Photo-Elastic Modulation System

Xing

et al. 2022

IEEE Trans. Instrum. Meas.

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Calibration for phase retardation of photoelastic modulator based on compound Bessel function

Cited by 7 publications

References 21 publications

Phase delay calibration of optimization method in phase modulated ellipsometry

Phase delay calibration of optimization method in phase modulated ellipsometry

Nonlinear Effect Analysis and Sensitivity Improvement in Spin Exchange Relaxation Free Atomic Magnetometers

Ultrahigh Sensitivity Optical Rotation Detection Based on Reflecting Photo-Elastic Modulation System

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