Calibration of achromatic Fresnel rhombs with an elliptical retarder model in Mueller matrix ellipsometers

To reduce the error induced by light source fluctuations, motor rotation instability, environment, and other factors in real-time measurements using dual-rotating compensator Mueller matrix ellipsometry (DRC-MME), an error-correction method based on a reference optical path is proposed. A modified Mueller matrix expression was derived theoretically by introducing the reference optical path of the DRC-MME system. Simulation analysis and experimental verification of the air, polarizer, and S i O 2 samples were performed using this method. The absolute error of the Mueller matrix elements of the S i O 2 samples decreased from less than 0.028 to less than 0.008, and the standard deviation decreased from 0.9% to 0.3%. This method has certain guiding significance in improving the measurement accuracy of DRC-MME.

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Calibration of achromatic Fresnel rhombs with an elliptical retarder model in Mueller matrix ellipsometers

Cited by 5 publications

References 16 publications

Spectroscopic ellipsometry to characterize the Transition-Metal dichalcogenides single crystals doping concentration

Spectroscopic ellipsometry to characterize the Transition-Metal dichalcogenides single crystals doping concentration

Calibration of polarization effects for the focusing lens pair in a micro-spot Mueller matrix ellipsometer

Error correction for Mueller matrix ellipsometry based on a reference optical path

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