Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing 2008
DOI: 10.1364/oft.2008.otua2
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Calibration of Modulation Transfer Function of Surface Profilometers with 1-D and 2-D Binary Pseudo-Random Array Standards

Valeriy V. Yashchuk
1
,
Wayne R. McKinney
2
,
Peter Z. Takacs
3

Abstract: Abstract:We suggest and describe the use of a binary pseudo-random grating as a standard test surface for calibration of the modulation transfer function of microscopes. Results from calibration of a Micromap TM -570 interferometric microscope are presented.

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